发明授权
US07713353B2 β-Ga2O3 single crystal growing method, thin-film single crystal growing method, Ga2O3 light-emitting device, and its manufacturing method
有权
< Ga 2 O 3单晶生长法,薄膜单晶生长法,Ga 2 O 3发光元件及其制造方法
- 专利标题: β-Ga2O3 single crystal growing method, thin-film single crystal growing method, Ga2O3 light-emitting device, and its manufacturing method
- 专利标题(中): < Ga 2 O 3单晶生长法,薄膜单晶生长法,Ga 2 O 3发光元件及其制造方法
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申请号: US12155991申请日: 2008-06-12
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公开(公告)号: US07713353B2公开(公告)日: 2010-05-11
- 发明人: Noboru Ichinose , Kiyoshi Shimamura , Kazuo Aoki , Encarnacion Antonia Garcia Villora
- 申请人: Noboru Ichinose , Kiyoshi Shimamura , Kazuo Aoki , Encarnacion Antonia Garcia Villora
- 申请人地址: JP Tokyo
- 专利权人: Waseda University
- 当前专利权人: Waseda University
- 当前专利权人地址: JP Tokyo
- 代理机构: McGinn IP Law Group, PLLC
- 优先权: JP2003-046552 20030224; JP2003-066020 20030312; JP2003-137916 20030515
- 主分类号: C30B28/12
- IPC分类号: C30B28/12 ; C30B25/00 ; C30B29/24 ; H01L27/15
摘要:
A method for growing a β-Ga2O3 single includes preparing a β-Ga2O3 seed crystal and growing the β-Ga2O3 single crystal from the β-Ga2O3 seed crystal in a predetermined direction.
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