发明授权
- 专利标题: Method of forming a micro-electromechanical (MEMS) switch
- 专利标题(中): 形成微机电(MEMS)开关的方法
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申请号: US11968896申请日: 2008-01-03
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公开(公告)号: US07726010B2公开(公告)日: 2010-06-01
- 发明人: Louis C. Hsu , Lawrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
- 申请人: Louis C. Hsu , Lawrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 H. Daniel Schnurmann
- 主分类号: H01H11/00
- IPC分类号: H01H11/00 ; H01H65/00
摘要:
A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.
公开/授权文献
- US20080092367A1 MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME 公开/授权日:2008-04-24
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