公开(公告)号：US07726010B2

公开(公告)日：2010-06-01

申请号：US11968896

申请日：2008-01-03

申请人： Louis C. Hsu ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Carl J. Radens ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

发明人： Louis C. Hsu ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Carl J. Radens ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01H11/00 ,  H01H65/00

CPC分类号： H01H50/005 ,  H01H2050/007 ,  Y10T29/4902 ,  Y10T29/49105 ,  Y10T29/49147

摘要： A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.

摘要翻译： 一种制造具有由至少一个感应线圈引导的微腔内的自由运动的感应元件的MEMS开关的方法。 开关由微腔一端的上感应线圈组成; 可选地，下感应线圈; 以及优选由磁性材料制成的自由移动的电感元件。 线圈设有内坡道合金芯。 通过使电流通过上部线圈，从而产生电感元件的磁场来实现切换。 磁场向上吸引自由移动的感应元件，短路两根开放的导线，闭合开关。 当电流停止或反转时，自由移动的磁性元件通过重力返回到微腔的底部并且导线打开。 当芯片没有以正确的方向安装时，下线圈将自由移动的感应元件拉回其原始位置。

公开(公告)号：US07394332B2

公开(公告)日：2008-07-01

申请号：US11217163

申请日：2005-09-01

申请人： Louis C. Hsu ,  Lowrence A. Clevenger ,  Timothy J. Dalton ,  Carl J. Radens ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

发明人： Louis C. Hsu ,  Lowrence A. Clevenger ,  Timothy J. Dalton ,  Carl J. Radens ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01P1/10

CPC分类号： H01H50/005 ,  H01H2050/007 ,  Y10T29/4902 ,  Y10T29/49105 ,  Y10T29/49147

摘要： A MEM switch is described having a free moving element within in micro-cavity, and guided by at least one inductive element. The switch consists of an upper inductive coil; an optional lower inductive coil, each having a metallic core preferably made of permalloy; a micro-cavity; and a free-moving switching element preferably also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When the chip is not mounted with the correct orientation, gravity cannot be used. In such an instance, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.

摘要翻译： 描述了一种MEM开关，其具有在微腔内的自由移动元件，并由至少一个电感元件引导。 开关由上感应线圈组成; 可选的下感应线圈，每个具有优选由坡莫合金制成的金属芯; 微腔; 以及优选也由磁性材料制成的自由移动的开关元件。 通过使电流通过上部线圈来实现切换，从而在线圈元件中产生磁场。 磁场向上吸引自由移动的磁性元件，短路两根开放的电线，从而闭合开关。 当电流停止或反转时，自由移动的磁性元件通过重力返回到微腔的底部并且电线打开。 当芯片未正确安装时，重力不能使用。 在这种情况下，需要下部线圈将自由移动的开关元件拉回并将其保持在其原始位置。

公开(公告)号：US07902061B2

公开(公告)日：2011-03-08

申请号：US12199407

申请日：2008-08-27

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Theodorus E. Standaert ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Theodorus E. Standaert ,  Keith Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L21/4763

CPC分类号： H01L21/76852 ,  H01L21/288 ,  H01L21/2885 ,  H01L21/76885 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of making an interconnect structure: which includes providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric material; and depositing an encasing cap over the extended portion of the interconnect structure.

摘要翻译： 一种制造互连结构的方法，其包括在介电材料中提供互连结构，使介电材料凹陷，使得互连结构的一部分在电介质材料的上表面上方延伸; 以及在所述互连结构的延伸部分上沉积封装盖。

公开(公告)号：US07105445B2

公开(公告)日：2006-09-12

申请号：US11034890

申请日：2005-01-14

申请人： Kwong-Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carl J. Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

发明人： Kwong-Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carl J. Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

IPC分类号： H01L21/44

CPC分类号： H01L21/76852 ,  H01L21/288 ,  H01L21/2885 ,  H01L21/76885 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of making an interconnect which includes providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric and depositing an encasing cap over the extended portion of the interconnect structure.

摘要翻译： 一种制造互连的方法，其包括在介电材料中提供互连结构，使所述电介质材料凹陷，使得所述互连结构的一部分在所述电介质的上表面上方延伸，并且在所述互连结构的所述延伸部分上沉积包封盖 。

公开(公告)号：US07528065B2

公开(公告)日：2009-05-05

申请号：US11333068

申请日：2006-01-17

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong-Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong-Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L21/4763

CPC分类号： H01L27/1203 ,  H01L21/28114 ,  H01L21/823456 ,  H01L21/84 ,  H01L29/42376 ,  H01L2924/0002 ,  H01L2924/00

摘要： A transistor device and method of forming the same comprises a substrate; a first gate electrode over the substrate; a second gate electrode over the substrate; and a landing pad comprising a pair of flanged ends overlapping the second gate electrode, wherein the structure of the second gate electrode is discontinuous with the structure of the landing pad.

摘要翻译： 晶体管器件及其形成方法包括：衬底; 衬底上的第一栅电极; 在所述衬底上方的第二栅电极; 以及着陆垫，其包括与所述第二栅电极重叠的一对凸缘端，其中所述第二栅极的结构与所述着陆焊盘的结构不连续。

公开(公告)号：US08304912B2

公开(公告)日：2012-11-06

申请号：US12054644

申请日：2008-03-25

申请人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

发明人： Lawrence A. Clevenger ,  Timothy J. Dalton ,  Louis C. Hsu ,  Carl Radens ,  Kwong Hon Wong ,  Chih-Chao Yang

IPC分类号： H01L23/48

CPC分类号： H01L27/1203 ,  H01L21/28114 ,  H01L21/823456 ,  H01L21/84 ,  H01L29/42376 ,  H01L2924/0002 ,  H01L2924/00

摘要： A transistor device and method of forming the same comprises a substrate; a first gate electrode over the substrate; a second gate electrode over the substrate; and a landing pad comprising a pair of flanged ends overlapping the second gate electrode, wherein the structure of the second gate electrode is discontinuous with the structure of the landing pad.

摘要翻译： 晶体管器件及其形成方法包括：衬底; 衬底上的第一栅电极; 在所述衬底上方的第二栅电极; 以及着陆垫，其包括与所述第二栅电极重叠的一对凸缘端，其中所述第二栅极的结构与所述着陆焊盘的结构不连续。

公开(公告)号：US20090305493A1

公开(公告)日：2009-12-10

申请号：US12541502

申请日：2009-08-14

申请人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

发明人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

IPC分类号： H01L21/768

CPC分类号： H01L23/5252 ,  H01L21/76843 ,  H01L21/76844 ,  H01L2924/0002 ,  H01L2924/00

摘要： An anti-fuse structure that included a buried electrically conductive, e.g., metallic layer as an anti-fuse material as well as a method of forming such an anti-fuse structure are provided. According to the present invention, the inventive anti-fuse structure comprises regions of leaky dielectric between interconnects. The resistance between these original interconnects starts decreasing when two adjacent interconnects are biased and causes a time-dependent dielectric breakdown, TDDB, phenomenon to occur. Decreasing of the resistance between adjacent interconnects can also be expedited via increasing the local temperature.

摘要翻译： 提供了一种抗熔丝结构，其包括掩埋的导电的，例如作为反熔丝材料的金属层以及形成这种抗熔丝结构的方法。 根据本发明，本发明的抗熔丝结构包括互连之间的漏电介质区域。 当两个相邻的互连被偏置时，这些原始互连之间的电阻开始减小，并且引起时间依赖介质击穿TDDB现象。 也可以通过增加局部温度来加速相邻互连之间的电阻的降低。

公开(公告)号：US20080283964A1

公开(公告)日：2008-11-20

申请号：US12144229

申请日：2008-06-23

申请人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

发明人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

IPC分类号： H01L23/525 ,  H01L21/44

CPC分类号： H01L23/5252 ,  H01L21/76843 ,  H01L21/76844 ,  H01L2924/0002 ,  H01L2924/00

摘要： An anti-fuse structure that included a buried electrically conductive, e.g., metallic layer as an anti-fuse material as well as a method of forming such an anti-fuse structure are provided. According to the present invention, the inventive anti-fuse structure comprises regions of leaky dielectric between interconnects. The resistance between these original interconnects starts decreasing when two adjacent interconnects are biased and causes a time-dependent dielectric breakdown, TDDB, phenomenon to occur. Decreasing of the resistance between adjacent interconnects can also be expedited via increasing the local temperature.

摘要翻译： 提供了一种抗熔丝结构，其包括掩埋的导电的，例如作为反熔丝材料的金属层以及形成这种抗熔丝结构的方法。 根据本发明，本发明的抗熔丝结构包括互连之间的漏电介质区域。 当两个相邻的互连被偏置时，这些原始互连之间的电阻开始减小，并且引起时间依赖介质击穿TDDB现象。 也可以通过增加局部温度来加速相邻互连之间的电阻的降低。

公开(公告)号：US08159042B2

公开(公告)日：2012-04-17

申请号：US12144229

申请日：2008-06-23

申请人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

发明人： Chih-Chao Yang ,  Lawrence A. Clevenger ,  Timothy J. Dalton ,  Nicholas C. Fuller ,  Louis C. Hsu

IPC分类号： H01L23/52

CPC分类号： H01L23/5252 ,  H01L21/76843 ,  H01L21/76844 ,  H01L2924/0002 ,  H01L2924/00

摘要： An anti-fuse structure that included a buried electrically conductive, e.g., metallic layer as an anti-fuse material as well as a method of forming such an anti-fuse structure are provided. According to the present invention, the inventive anti-fuse structure comprises regions of leaky dielectric between interconnects. The resistance between these original interconnects starts decreasing when two adjacent interconnects are biased and causes a time-dependent dielectric breakdown, TDDB, phenomenon to occur. Decreasing of the resistance between adjacent interconnects can also be expedited via increasing the local temperature.

摘要翻译： 提供了一种抗熔丝结构，其包括掩埋的导电的，例如作为反熔丝材料的金属层以及形成这种抗熔丝结构的方法。 根据本发明，本发明的抗熔丝结构包括互连之间的漏电介质区域。 当两个相邻的互连被偏置时，这些原始互连之间的电阻开始减小，并且引起时间依赖介质击穿TDDB现象。 也可以通过增加局部温度来加速相邻互连之间的电阻的降低。

公开(公告)号：US07488677B2

公开(公告)日：2009-02-10

申请号：US11503259

申请日：2006-08-14

申请人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carol Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

发明人： Kwong Hon Wong ,  Louis C. Hsu ,  Timothy J. Dalton ,  Carol Radens ,  Chih-Chao Yang ,  Lawrence A. Clevenger ,  Theodorus E. Standaert

IPC分类号： H01L21/4763

CPC分类号： H01L21/76852 ,  H01L21/288 ,  H01L21/2885 ,  H01L21/76885 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of making an interconnect that includes providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric; and depositing an encasing cap over the extended portion of the interconnect structure.

摘要翻译： 一种制造互连的方法，包括在电介质材料中提供互连结构，使电介质材料凹陷，使得互连结构的一部分在电介质的上表面上方延伸; 以及在所述互连结构的延伸部分上沉积封装盖。