发明授权
- 专利标题: Method of fabricating semiconductor package structure
- 专利标题(中): 制造半导体封装结构的方法
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申请号: US11866942申请日: 2007-10-03
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公开(公告)号: US07732328B2公开(公告)日: 2010-06-08
- 发明人: Yong-Chai Kwon , Dong-Ho Lee
- 申请人: Yong-Chai Kwon , Dong-Ho Lee
- 申请人地址: KR Gyeonggi-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Myers Bigel Sibley & Sajovec, PA
- 优先权: KR10-2006-0097474 20061003
- 主分类号: H01L21/44
- IPC分类号: H01L21/44 ; H01L21/48
摘要:
A semiconductor package structure and a method of fabricating the same are disclosed. A method of fabricating the semiconductor package structure can be characterized as including forming semiconductor chips on a semiconductor substrate. Each of the semiconductor chips includes chip pads. Through-vias are formed through the semiconductor chips. Redistribution structures and a chip selection interconnection layer are formed on the semiconductor chips, which connect the through-vias with the chip pads. The chip selection interconnection layers are patterned to form chip selection interconnection lines having different structures on at least one of the semiconductor chips. The semiconductor chips are stacked and electrically connected using the through-vias.
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