发明授权
- 专利标题: Temperature measurement with reduced extraneous infrared in a processing chamber
- 专利标题(中): 在处理室内减少外来红外线的温度测量
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申请号: US12217063申请日: 2008-06-30
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公开(公告)号: US07758238B2公开(公告)日: 2010-07-20
- 发明人: Sridhar Govindaraju , Karson Knutson , Harold Kennel , Aravind Killampalli , Jack Hwang
- 申请人: Sridhar Govindaraju , Karson Knutson , Harold Kennel , Aravind Killampalli , Jack Hwang
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: G01K5/00
- IPC分类号: G01K5/00 ; G01K13/00 ; G01J5/00
摘要:
Temperature measurement using a pyrometer in a processing chamber is described. The extraneous light received by the pyrometer is reduced. In one example, a photodetector is used to measure the intensity of light within the processing chamber at a defined wavelength. A temperature circuit is used to convert the measured light intensity to a temperature signal, and a doped optical window between a heat source and a workpiece inside processing chamber is used to absorb light at the defined wavelength directed at the workpiece from the heat source.
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