发明授权
- 专利标题: Method of controlling orientation of domains in block copolymer films
- 专利标题(中): 控制嵌段共聚物膜中取向的方法
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申请号: US12013138申请日: 2008-01-11
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公开(公告)号: US07763319B2公开(公告)日: 2010-07-27
- 发明人: Joy Cheng , Ho-Cheol Kim , Daniel P. Sanders , Linda Sundberg
- 申请人: Joy Cheng , Ho-Cheol Kim , Daniel P. Sanders , Linda Sundberg
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 主分类号: B05D5/00
- IPC分类号: B05D5/00 ; B05D5/12
摘要:
A method of orienting microphase-separated domains is disclosed, comprising applying a composition comprising an orientation control component, and a block copolymer assembly component comprising a block copolymer having at least two microphase-separated domains in which the orientation control component is substantially immiscible with the block copolymer assembly component upon forming a film; and forming a compositionally vertically segregated film on the surface of the substrate from the composition. The orientation control component and block copolymer segregate during film forming to form the compositionally vertically-segregated film on the surface of a substrate, where the orientation control component is enriched adjacent to the surface of the compositionally segregated film adjacent to the surface of the substrate, and the block copolymer assembly is enriched at an air-surface interface.
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