Invention Grant
US07767023B2 Device for containing catastrophic failure of a turbomolecular pump
有权
包含涡轮分子泵的灾难性故障的装置
- Patent Title: Device for containing catastrophic failure of a turbomolecular pump
- Patent Title (中): 包含涡轮分子泵的灾难性故障的装置
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Application No.: US11691165Application Date: 2007-03-26
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Publication No.: US07767023B2Publication Date: 2010-08-03
- Inventor: Jeffrey Burgess
- Applicant: Jeffrey Burgess
- Applicant Address: US AZ Chandler
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: US AZ Chandler
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: C23C16/00
- IPC: C23C16/00 ; F01D1/36 ; F03B5/00 ; F04B35/04 ; C23F1/00 ; H01L21/306

Abstract:
A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum processing system at an inlet end. The TMP includes a longitudinal axis substantially parallel to an axis of rotation of the TMP and a first lateral axis substantially perpendicular to the longitudinal axis. The vacuum system also includes a containment device configured to mitigate the catastrophic failure of the TMP by impeding only one translational degree of freedom (DOF) and only one rotational DOF of the movement of the TMP. Impeding only one translational DOF includes impeding translational motion of the TMP in a first lateral direction substantially parallel to the first lateral axis. Impeding only one rotational DOF includes impeding rotation of the TMP about the longitudinal axis.
Public/Granted literature
- US20080240948A1 DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP Public/Granted day:2008-10-02
Information query
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