Invention Grant
US07793668B2 Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
有权
清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法
- Patent Title: Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
- Patent Title (中): 清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法
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Application No.: US11014779Application Date: 2004-12-20
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Publication No.: US07793668B2Publication Date: 2010-09-14
- Inventor: Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
- Applicant: Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
- Applicant Address: JP Osaka
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Osaka
- Agency: Sughrue Mion, PLLC
- Priority: JPP.2000-168423 20000606; JPP.2000-177963 20000614; JPP.2000-177964 20000614; JPP.2000-230339 20000731; JPP.2000-243752 20000811; JPP.2000-349840 20001116; JPP.2001-004634 20010112; JPP.2003-424547 20031222; JPP.2004-004512 20040109; JPP.2004-183788 20040622
- Main IPC: B08B3/00
- IPC: B08B3/00
Abstract:
A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
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