发明授权
- 专利标题： Device with phase-separated dielectric structure
- 专利标题（中）： 具有相分离介质结构的器件
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申请号： US11695138申请日： 2007-04-02
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公开(公告)号： US07795614B2公开(公告)日： 2010-09-14
- 发明人: Yiliang Wu , Hadi K Mahabadi , Beng S Ong , Paul F Smith
- 申请人： Yiliang Wu , Hadi K Mahabadi , Beng S Ong , Paul F Smith
- 申请人地址： US CT Norwalk
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： US CT Norwalk
- 代理机构： Fay Sharpe LLP
- 主分类号： H01L29/10
- IPC分类号： H01L29/10
摘要：
An electronic device including in any sequence: (a) a semiconductor layer; and (b) a phase-separated dielectric structure comprising a lower-k dielectric polymer and a higher-k dielectric polymer, wherein the lower-k dielectric polymer is in a higher concentration than the higher-k dielectric polymer in a region of the dielectric structure closest to the semiconductor layer.
公开/授权文献
- US20080237581A1 DEVICE WITH PHASE-SEPARATED DIELECTRIC STRUCTURE 公开/授权日：2008-10-02
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