发明授权
- 专利标题: Photocatalyst element, method and device for preparing the same
- 专利标题(中): 光催化剂元素,其制备方法和装置
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申请号: US10490116申请日: 2002-09-27
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公开(公告)号: US07799731B2公开(公告)日: 2010-09-21
- 发明人: Junji Hiraoka , Takahiro Doke , Hisato Haraga , Daisuke Noguchi , Yoshio Kawamata
- 申请人: Junji Hiraoka , Takahiro Doke , Hisato Haraga , Daisuke Noguchi , Yoshio Kawamata
- 申请人地址: JP Yokohama-shi
- 专利权人: Shibaura Mechatronics Corporation
- 当前专利权人: Shibaura Mechatronics Corporation
- 当前专利权人地址: JP Yokohama-shi
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2001-303953 20010928
- 国际申请: PCT/JP02/10007 WO 20020927
- 国际公布: WO03/028885 WO 20030410
- 主分类号: B01J21/06
- IPC分类号: B01J21/06 ; C01G23/047 ; C23C14/08 ; C23C14/34 ; C23C14/35 ; C23C14/56
摘要:
A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.
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