发明授权
US07811934B2 Method of manufacturing nanoelectrode lines using nanoimprint lithography process
有权
使用纳米压印光刻工艺制造纳米电极线的方法
- 专利标题: Method of manufacturing nanoelectrode lines using nanoimprint lithography process
- 专利标题(中): 使用纳米压印光刻工艺制造纳米电极线的方法
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申请号: US12045769申请日: 2008-03-11
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公开(公告)号: US07811934B2公开(公告)日: 2010-10-12
- 发明人: Mi Hee Jeong , Hyo Young Lee , Nak Jin Choi , Kang Ho Park
- 申请人: Mi Hee Jeong , Hyo Young Lee , Nak Jin Choi , Kang Ho Park
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2007-0071993 20070719
- 主分类号: H01L21/033
- IPC分类号: H01L21/033 ; H01L21/311
摘要:
Provided are a method of manufacturing nanoelectrode lines. The method includes the steps of: sequentially forming an insulating layer, a first photoresist layer, and a drop-shaped second photoresist on a substrate; disposing an imprint mold having a plurality of molding patterns over the second photoresist; applying pressure to the mold to allow the second photoresist to flow into the mold patterns; irradiating ultraviolet (UV) light onto the mold to cure the second photoresist; removing the mold from the cured second photoresist and patterning the second photoresist; patterning the first photoresist layer using the patterned second photoresist as a mask; patterning the insulating layer; and forming a metal layer between the patterned insulating layers. In this method, metal electrode lines are formed between insulating layers using an imprint lithography process, so that nanoelectronic devices can be freed from crosstalk between the metal electrode lines.
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