发明授权
- 专利标题: Method of NBTI prediction
- 专利标题(中): NBTI预测方法
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申请号: US11556489申请日: 2006-11-03
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公开(公告)号: US07820457B2公开(公告)日: 2010-10-26
- 发明人: Chia-Lin Chen , Yi-Miaw Lin , Ming-Chen Chen
- 申请人: Chia-Lin Chen , Yi-Miaw Lin , Ming-Chen Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 代理商 Steven E. Koffs
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A method includes measuring a gate leakage current of a plurality of transistors. A single stress bias voltage is applied to the plurality of transistors. The stress bias voltage causes a 10% degradation in a drive current of each transistor within a respective stress period t. One or more relationships are determined, between the measured gate leakage current and one or more of the group consisting of gate voltage, gate length, gate temperature, and gate width of the plurality of transistors, respectively. A negative bias temperature instability (NBTI) lifetime τ of the plurality of transistors is estimated, based on the measured gate leakage current and the one or more relationships.
公开/授权文献
- US20070238200A1 METHOD OF NBTI PREDICTION 公开/授权日:2007-10-11
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