发明授权
US07820523B2 Fabrication of active areas of different natures directly onto an insulator: application to the single or double gate MOS transistor
有权
将不同性质的有源区域直接制造到绝缘体上:应用于单栅极或双栅极MOS晶体管
- 专利标题: Fabrication of active areas of different natures directly onto an insulator: application to the single or double gate MOS transistor
- 专利标题(中): 将不同性质的有源区域直接制造到绝缘体上:应用于单栅极或双栅极MOS晶体管
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申请号: US11579037申请日: 2004-06-25
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公开(公告)号: US07820523B2公开(公告)日: 2010-10-26
- 发明人: François Andrieu , Thomas Ernst , Simon Deleonibus
- 申请人: François Andrieu , Thomas Ernst , Simon Deleonibus
- 申请人地址: FR Paris
- 专利权人: Commissariat a l'Energie Atomique
- 当前专利权人: Commissariat a l'Energie Atomique
- 当前专利权人地址: FR Paris
- 代理机构: McKenna Long & Aldridge LLP
- 优先权: FR0450889 20040507
- 国际申请: PCT/EP2004/051255 WO 20040625
- 国际公布: WO2005/109509 WO 20051117
- 主分类号: H01L21/30
- IPC分类号: H01L21/30
摘要:
The invention concerns a micro-electronic device comprising a substrate, a first insulating zone and a second insulating zone laying on said substrate, a first active zone comprising at least one layer made of a first semi-conductor crystalline material, resting on said first insulating zone which insulates it from the substrate, at least one second active zone comprising at least one layer in a second semi-conductor crystalline material, laying on said second insulating zone which insulates it from the substrate, said first semi-conductor crystalline material having a different composition from that of the second semi-conductor crystalline material and/or different crystalline orientation from that of the second semi-conductor crystalline material and/or mechanical strains from that of the second semi-conductor crystalline material.
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