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US07824528B2 End-block for a rotatable target sputtering apparatus 失效
用于可旋转靶溅射装置的端块

End-block for a rotatable target sputtering apparatus
摘要:
An end-block for electrically energising a rotatable tubular target in a vacuum coating installation is disclosed. The end-block has a rotary electrical contact that reduces the joule heating effects when operating in alternating current mode. When compared to known end-blocks, this is achieved by increasing the number of contact areas between a contacting ring and a series of circumferentially mounted contacting shoes. Also the contact shoes are being pressed radially outwardly by means of resilient elements against the contacting ring.
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