Invention Grant
- Patent Title: Micromechanical component and corresponding method for its manufacture
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US11883671Application Date: 2006-01-25
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Publication No.: US07834409B2Publication Date: 2010-11-16
- Inventor: Frank Reichenbach , Franz Laermer , Silvia Kronmueller , Christoph Schelling , Tino Fuchs , Christina Leinenbach
- Applicant: Frank Reichenbach , Franz Laermer , Silvia Kronmueller , Christoph Schelling , Tino Fuchs , Christina Leinenbach
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005004877 20050203
- International Application: PCT/EP2006/050439 WO 20060125
- International Announcement: WO2006/082155 WO 20060810
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L21/00

Abstract:
A micromechanical component having a conductive substrate, an elastically deflectable diaphragm including at least one conductive layer, which is provided over a front side of the substrate, the conductive layer being electrically insulated from the substrate, a hollow space, which is provided between the substrate and the diaphragm and is filled with a medium, and a plurality of perforation openings, which run under the diaphragm through the substrate, the perforation openings providing access to the hollow space from a back surface of the substrate, so that a volume of the medium located in the hollow space may change when the diaphragm is deflected. Also described is a corresponding manufacturing method.
Public/Granted literature
- US20090026561A1 Micromechanical component and corresponding method for its manufacture Public/Granted day:2009-01-29
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