发明授权
- 专利标题: Micromechanical component and corresponding method for its manufacture
- 专利标题(中): 微机械部件及其制造方法
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申请号: US11883671申请日: 2006-01-25
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公开(公告)号: US07834409B2公开(公告)日: 2010-11-16
- 发明人: Frank Reichenbach , Franz Laermer , Silvia Kronmueller , Christoph Schelling , Tino Fuchs , Christina Leinenbach
- 申请人: Frank Reichenbach , Franz Laermer , Silvia Kronmueller , Christoph Schelling , Tino Fuchs , Christina Leinenbach
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102005004877 20050203
- 国际申请: PCT/EP2006/050439 WO 20060125
- 国际公布: WO2006/082155 WO 20060810
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; H01L21/00
摘要:
A micromechanical component having a conductive substrate, an elastically deflectable diaphragm including at least one conductive layer, which is provided over a front side of the substrate, the conductive layer being electrically insulated from the substrate, a hollow space, which is provided between the substrate and the diaphragm and is filled with a medium, and a plurality of perforation openings, which run under the diaphragm through the substrate, the perforation openings providing access to the hollow space from a back surface of the substrate, so that a volume of the medium located in the hollow space may change when the diaphragm is deflected. Also described is a corresponding manufacturing method.