发明授权
US07854828B2 Method and apparatus for electroplating including remotely positioned second cathode
有权
用于电镀的方法和装置,包括远处定位的第二阴极
- 专利标题: Method and apparatus for electroplating including remotely positioned second cathode
- 专利标题(中): 用于电镀的方法和装置,包括远处定位的第二阴极
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申请号: US11506054申请日: 2006-08-16
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公开(公告)号: US07854828B2公开(公告)日: 2010-12-21
- 发明人: Jonathan Reid , Seshasayee Varadarajan , Bryan Buckalew , Patrick Breiling , Glenn Ibarreta
- 申请人: Jonathan Reid , Seshasayee Varadarajan , Bryan Buckalew , Patrick Breiling , Glenn Ibarreta
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: C25D5/18
- IPC分类号: C25D5/18 ; C25D21/12
摘要:
An apparatus for electroplating a layer of metal on the surface of a wafer includes a second cathode located remotely with respect to the wafer. The remotely positioned second cathode allows modulation of current density at the wafer surface during an entire electroplating process. The second cathode diverts a portion of current flow from the near-edge region of the wafer and improves the uniformity of plated layers. The remote position of second cathode allows the insulating shields disposed in the plating bath to shape the current profile experienced by the wafer, and therefore act as a “virtual second cathode”. The second cathode may be positioned outside of the plating vessel and separated from it by a membrane.
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