Invention Grant
US07854828B2 Method and apparatus for electroplating including remotely positioned second cathode
有权
用于电镀的方法和装置,包括远处定位的第二阴极
- Patent Title: Method and apparatus for electroplating including remotely positioned second cathode
- Patent Title (中): 用于电镀的方法和装置,包括远处定位的第二阴极
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Application No.: US11506054Application Date: 2006-08-16
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Publication No.: US07854828B2Publication Date: 2010-12-21
- Inventor: Jonathan Reid , Seshasayee Varadarajan , Bryan Buckalew , Patrick Breiling , Glenn Ibarreta
- Applicant: Jonathan Reid , Seshasayee Varadarajan , Bryan Buckalew , Patrick Breiling , Glenn Ibarreta
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D5/18
- IPC: C25D5/18 ; C25D21/12

Abstract:
An apparatus for electroplating a layer of metal on the surface of a wafer includes a second cathode located remotely with respect to the wafer. The remotely positioned second cathode allows modulation of current density at the wafer surface during an entire electroplating process. The second cathode diverts a portion of current flow from the near-edge region of the wafer and improves the uniformity of plated layers. The remote position of second cathode allows the insulating shields disposed in the plating bath to shape the current profile experienced by the wafer, and therefore act as a “virtual second cathode”. The second cathode may be positioned outside of the plating vessel and separated from it by a membrane.
Public/Granted literature
- US20100032303A1 Method and apparatus for electroplating including remotely positioned second cathode Public/Granted day:2010-02-11
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