发明授权
US07863924B2 Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies
失效
用于微特征装置测试的推动器组件,具有推动器组件的系统以及使用这种推动器组件的方法
- 专利标题: Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies
- 专利标题(中): 用于微特征装置测试的推动器组件,具有推动器组件的系统以及使用这种推动器组件的方法
-
申请号: US12644185申请日: 2009-12-22
-
公开(公告)号: US07863924B2公开(公告)日: 2011-01-04
- 发明人: Michael Slaughter , Christie Dyan Larson
- 申请人: Michael Slaughter , Christie Dyan Larson
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Perkins Coie LLP
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G01R31/28 ; G01R31/02
摘要:
Pusher assemblies for use in microelectronic device testing systems and methods for using such pusher assemblies are disclosed herein. One particular embodiment of such a pusher assembly comprises a plate having a first side and a second side opposite the first side. An engagement assembly is removably coupled to the second side of the plate and positioned to contact a microfeature device being tested. The pusher assembly can include an urging member proximate the first side of the plate and configured to move the engagement assembly toward the device being tested. The pusher assembly can also include a heat transfer unit carried by the first side of the plate. In several embodiments, the pusher assembly can further include a plurality of pins carried by the engagement assembly such that the pins extend through the plate and engage the urging member to restrict axial movement of the urging member toward the device being tested.
公开/授权文献
信息查询