发明授权
US07864413B2 Examination apparatus with multiple image acquisition devices 有权
具有多个图像采集装置的检查装置

Examination apparatus with multiple image acquisition devices
摘要:
An examination apparatus that observes a specimen in a stationary state while suppressing the blurring caused by a control delay. The apparatus includes a first optical system and a second optical system for imaging light produced in a specimen, a first image-acquisition unit with a plurality of first image-acquisition devices for detecting an image formed by the first optical system, a second image-acquisition unit with a second image-acquisition device for acquiring an image formed by the second optical system, and a driving unit that causes the images to be formed at the same position in the second image-acquisition unit. The value obtained by dividing the pixel size Y of the first image-acquisition devices by the magnification X of the first optical system is smaller than the value obtained by dividing the pixel size Y′ of the second image-acquisition device by the magnification X′ of the second optical system.
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