发明授权
- 专利标题: Examination apparatus with multiple image acquisition devices
- 专利标题(中): 具有多个图像采集装置的检查装置
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申请号: US11840449申请日: 2007-08-17
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公开(公告)号: US07864413B2公开(公告)日: 2011-01-04
- 发明人: Yoshihisa Tanikawa , Tomoaki Sato , Ikuko Sakai
- 申请人: Yoshihisa Tanikawa , Tomoaki Sato , Ikuko Sakai
- 申请人地址: JP Tokyo
- 专利权人: Olympus Corporation
- 当前专利权人: Olympus Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 优先权: JP2006-229722 20060825
- 主分类号: G02B21/36
- IPC分类号: G02B21/36
摘要:
An examination apparatus that observes a specimen in a stationary state while suppressing the blurring caused by a control delay. The apparatus includes a first optical system and a second optical system for imaging light produced in a specimen, a first image-acquisition unit with a plurality of first image-acquisition devices for detecting an image formed by the first optical system, a second image-acquisition unit with a second image-acquisition device for acquiring an image formed by the second optical system, and a driving unit that causes the images to be formed at the same position in the second image-acquisition unit. The value obtained by dividing the pixel size Y of the first image-acquisition devices by the magnification X of the first optical system is smaller than the value obtained by dividing the pixel size Y′ of the second image-acquisition device by the magnification X′ of the second optical system.
公开/授权文献
- US20080049309A1 EXAMINATION APPARATUS 公开/授权日:2008-02-28
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