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US07875481B2 Semiconductor apparatus and method for manufacturing the same 有权
半导体装置及其制造方法

Semiconductor apparatus and method for manufacturing the same
Abstract:
It is made possible to provide a highly integrated, thin apparatus can be obtained, even if the apparatus contains MEMS devices and semiconductor devices. A semiconductor apparatus includes: a first chip comprising a MEMS device formed therein; a second chip comprising a semiconductor device formed therein; and an adhesive layer bonding a side face of the first chip to a side face of the second chip, and having a lower Young's modulus than the material of the first and second chips.
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