Invention Grant
US07875502B2 Semiconductor chips with crack stop regions for reducing crack propagation from chip edges/corners 有权
具有裂纹停止区域的半导体芯片,用于减少从芯片边缘/角落的裂纹扩展

Semiconductor chips with crack stop regions for reducing crack propagation from chip edges/corners
Abstract:
A chip fabrication method. A provided structure includes: a transistor on a semiconductor substrate, N interconnect layers on the semiconductor substrate and the transistor (N>0), and a first dielectric layer on the N interconnect layers. The transistor is electrically coupled to the N interconnect layers. P crack stop regions and Q crack stop regions are formed on the first dielectric layer (P, Q>0). The first dielectric layer is sandwiched between the N interconnect layers and a second dielectric layer that is formed on the first dielectric layer. Each P crack stop region is completely surrounded by the first and second dielectric layers. The second dielectric layer is sandwiched between the first dielectric layer and an underfill layer that is formed on the second dielectric layer. Each Q crack stop region is completely surrounded by the first dielectric layer and the underfill layer.
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