发明授权
- 专利标题： Apparatus for manufacturing flat-panel display
- 专利标题（中）： 用于制造平板显示器的装置
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申请号： US12324256申请日： 2008-11-26
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公开(公告)号： US07879181B2公开(公告)日： 2011-02-01
- 发明人: Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- 申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- 申请人地址： KR Sungnam-shi
- 专利权人： Advanced Display Process Engineering Co., Ltd.
- 当前专利权人： Advanced Display Process Engineering Co., Ltd.
- 当前专利权人地址： KR Sungnam-shi
- 代理机构： KED & Associates, LLP
- 优先权： KR10-2004-0079416 20041006; KR10-2004-0083843 20041020; KR10-2004-0094230 20041117; KR10-2004-00102975 20041208; KR10-2004-0111693 20041224
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; C23C16/00
摘要：
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
公开/授权文献
- US20090078200A1 APPARATUS FOR MANUFACTURING FLAT-PANEL DISPLAY 公开/授权日：2009-03-26
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