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公开(公告)号：US08821642B2
公开(公告)日：2014-09-02
申请号：US12324202
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US20090078200A1
公开(公告)日：2009-03-26
申请号：US12324256
申请日：2008-11-26
申请人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23C16/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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公开(公告)号：US20090084316A1
公开(公告)日：2009-04-02
申请号：US12324297
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23C16/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US08758516B2
公开(公告)日：2014-06-24
申请号：US12324297
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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公开(公告)号：US07879181B2
公开(公告)日：2011-02-01
申请号：US12324256
申请日：2008-11-26
申请人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要翻译： 这里公开了一种平板显示器（FPD）制造装置，用于在腔室中建立真空气氛之后，对位于腔室中的基板执行期望的处理。 真空室分为室主体和上盖，以确保上盖容易打开/关闭操作。
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公开(公告)号：US20090078373A1
公开(公告)日：2009-03-26
申请号：US12324202
申请日：2008-11-26
申请人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
发明人： Young Jong LEE , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
IPC分类号： C23F1/00
CPC分类号： B23Q11/0891 , H01L21/6719
摘要： Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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