发明授权
US07881010B2 Process for self-aligned flare point and shield throat definition prior to main pole patterning 有权
在主极图案化之前,自对准耀斑和屏蔽喉定义的过程

Process for self-aligned flare point and shield throat definition prior to main pole patterning
摘要:
A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.
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