Invention Grant
US07884935B2 Pattern transfer apparatus, imprint apparatus, and pattern transfer method
有权
图案转印装置,压印装置和图案转印方法
- Patent Title: Pattern transfer apparatus, imprint apparatus, and pattern transfer method
- Patent Title (中): 图案转印装置,压印装置和图案转印方法
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Application No.: US11736696Application Date: 2007-04-18
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Publication No.: US07884935B2Publication Date: 2011-02-08
- Inventor: Nobuhito Suehira , Junichi Seki , Hideki Ina , Koichi Sentoku
- Applicant: Nobuhito Suehira , Junichi Seki , Hideki Ina , Koichi Sentoku
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-114093 20060418; JP2006-305310 20061110; JP2007-036598 20070216
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B15/00 ; G01N21/86 ; G01V8/00 ; B41F1/34 ; B41F21/12 ; B41F21/14 ; B41L1/02 ; B29C45/76 ; B29C35/08 ; B29C35/12 ; B29C47/92 ; B29C47/96 ; B29B13/00 ; B29B15/00 ; B28B17/00

Abstract:
A pattern transfer apparatus transfers an imprint pattern formed on a mold, provided with an alignment mark, to a resin material on a substrate, provided with an alignment mark. A first image pickup device obtains an image of an object positioned at a first object position. A second image pickup device obtains an image of an object positioned at a second object position. The second object position is more distant from the alignment mark of the mold than the first object position. An optical system forms an image of an object positioned at the first object position and an image of an object positioned at the second object position. Alignment is performed based on first and second information obtained about positions of images of an alignment mark of a reference substrate and an alignment mark of the substrate, to transfer the imprinting pattern to the resin material.
Public/Granted literature
- US20070242272A1 PATTERN TRANSFER APPARATUS, IMPRINT APPARATUS, AND PATTERN TRANSFER METHOD Public/Granted day:2007-10-18
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