发明授权
US07887988B2 Positive resist composition and pattern forming method using the same
有权
正型抗蚀剂组合物和使用其的图案形成方法
- 专利标题: Positive resist composition and pattern forming method using the same
- 专利标题(中): 正型抗蚀剂组合物和使用其的图案形成方法
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申请号: US11717645申请日: 2007-03-14
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公开(公告)号: US07887988B2公开(公告)日: 2011-02-15
- 发明人: Kazuyoshi Mizutani , Kaoru Iwato , Kunihiko Kodama , Masaomi Makino
- 申请人: Kazuyoshi Mizutani , Kaoru Iwato , Kunihiko Kodama , Masaomi Makino
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPP2006-069383 20060314
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20 ; G03F7/30
摘要:
A resist composition, which comprises: (A) a resin containing a repeating unit represented by formula (I); and (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation: wherein AR represents a benzene ring or a naphthalene ring; R represents a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group; Z represents a linking group for forming a ring together with AR; and A represents an atom or group selected from the group consisting of a hydrogen atom, an alkyl group, a halogen atom, a cyano group and an alkyloxycarbonyl group, and a pattern forming method using the resist composition.
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