Invention Grant
US07907263B2 Apparatuses and methods using measurement of a flare generated in an optical system
失效
使用在光学系统中产生的耀斑的测量的装置和方法
- Patent Title: Apparatuses and methods using measurement of a flare generated in an optical system
- Patent Title (中): 使用在光学系统中产生的耀斑的测量的装置和方法
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Application No.: US12493229Application Date: 2009-06-28
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Publication No.: US07907263B2Publication Date: 2011-03-15
- Inventor: Michiko Aizawa , Eiji Aoki , Osamu Kakuchi , Yoshiyuki Kuramoto
- Applicant: Michiko Aizawa , Eiji Aoki , Osamu Kakuchi , Yoshiyuki Kuramoto
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2008-172642 20080701
- Main IPC: G01B9/00
- IPC: G01B9/00 ; G01B9/02 ; G01B11/02
Abstract:
The present invention provides a method including measuring a wavefront aberration of the optical system to be measured on a measurement surface, measuring a pupil transmittance distribution of the optical system determining a pupil function of the optical system based on the wavefront aberration and the pupil transmittance distribution, and performing imaging computation using the pupil function to obtain a light intensity distribution formed on an image plane of the optical system, and calculating a flare, generated in the optical system, from the light intensity distribution.
Public/Granted literature
- US20100002243A1 APPARATUSES AND METHODS USING MEASUREMENT OF A FLARE GENERATED IN AN OPTICAL SYSTEM Public/Granted day:2010-01-07
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