发明授权
US07911038B2 Wiring board, semiconductor device using wiring board and their manufacturing methods
有权
接线板,使用接线板的半导体器件及其制造方法
- 专利标题: Wiring board, semiconductor device using wiring board and their manufacturing methods
- 专利标题(中): 接线板,使用接线板的半导体器件及其制造方法
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申请号: US12306987申请日: 2007-06-29
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公开(公告)号: US07911038B2公开(公告)日: 2011-03-22
- 发明人: Katsumi Kikuchi , Shintaro Yamamichi , Hideya Murai , Takuo Funaya , Kentaro Mori , Takehiko Maeda , Hirokazu Honda , Kenta Ogawa , Jun Tsukano
- 申请人: Katsumi Kikuchi , Shintaro Yamamichi , Hideya Murai , Takuo Funaya , Kentaro Mori , Takehiko Maeda , Hirokazu Honda , Kenta Ogawa , Jun Tsukano
- 申请人地址: JP Kanagawa
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: Young & Thompson
- 优先权: JP2006-181257 20060630
- 国际申请: PCT/JP2007/063179 WO 20070629
- 国际公布: WO2008/001915 WO 20080103
- 主分类号: H01L23/495
- IPC分类号: H01L23/495
摘要:
A wiring board has an insulating layer, a plurality of wiring layers formed in such a way as to be insulated from each other by the insulating layer, and a plurality of vias formed in the insulating layer to connect the wiring layers. Of the wiring layers, a surface wiring layer formed in one surface of the insulating layer include a first metal film exposed from the one surface and a second metal film embedded in the insulating layer and stacked on the first metal film. Edges of the first metal film project from edges of the second metal film in the direction in which the second metal film spreads. By designing the shape of the wiring layers embedded in the insulating layer in this manner, it is possible to obtain a highly reliable wiring board that can be effectively prevented from side etching in the manufacturing process and can adapt to miniaturization and highly dense packaging of wires.
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