发明授权
- 专利标题： Thin film tuning-fork type inflection resonator and electric signal processing element
- 专利标题（中）： 薄膜音叉型变形谐振器和电信号处理元件
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申请号： US11670081申请日： 2007-02-01
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公开(公告)号： US07915793B2公开(公告)日： 2011-03-29
- 发明人: Atsushi Isobe , Nobuhiko Shibagaki , Kengo Asai , Hisanori Matsumoto
- 申请人： Atsushi Isobe , Nobuhiko Shibagaki , Kengo Asai , Hisanori Matsumoto
- 申请人地址： JP Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Brundidge & Stanger, P.C.
- 优先权： JP2006-028230 20060206
- 主分类号： H03H9/21
- IPC分类号： H03H9/21 ; H01L41/08
摘要：
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.