Invention Grant
US07928026B2 Synthetic silica material with low fluence-dependent-transmission and method of making the same
有权
合成二氧化硅材料，具有低通量依赖性传输和制作相同的方法
- Patent Title: Synthetic silica material with low fluence-dependent-transmission and method of making the same
- Patent Title (中): 合成二氧化硅材料，具有低通量依赖性传输和制作相同的方法
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Application No.: US11261005Application Date: 2005-10-28
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Publication No.: US07928026B2Publication Date: 2011-04-19
- Inventor: Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
- Applicant: Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Siwen Chen; Robert P. Santandrea
- Main IPC: C03C3/06
- IPC: C03C3/06 ; C03B32/00 ; C03B15/00 ; C03B17/00 ; C03B19/00 ; C03B19/06
Abstract:
Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].
Public/Granted literature
- US20070004579A1 Synthetic silica material with low fluence-dependent-transmission and method of making the same Public/Granted day:2007-01-04
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