发明授权
- 专利标题: Antireflective coating composition
- 专利标题(中): 防反射涂料组合物
-
申请号: US12115776申请日: 2008-05-06
-
公开(公告)号: US07932018B2公开(公告)日: 2011-04-26
- 发明人: Douglas McKenzie , David Abdallah , Allen G. Timko , M. Dalil Rahman
- 申请人: Douglas McKenzie , David Abdallah , Allen G. Timko , M. Dalil Rahman
- 申请人地址: US NJ Somerville
- 专利权人: AZ Electronic Materials USA Corp.
- 当前专利权人: AZ Electronic Materials USA Corp.
- 当前专利权人地址: US NJ Somerville
- 代理商 Sangya Jain
- 主分类号: G03F7/09
- IPC分类号: G03F7/09 ; G03F7/075
摘要:
The invention relates to an antireflective coating composition comprising a polymer, a crosslinker and a thermal acid generator, where the polymer comprises at least one unit of structure (1), at least one unit of structure (2) and at least one structure of structure (3), where R1 to R9 is independently selected from H and C1-C6 alkyl, R′ and R″ is independently selected from H and C1-C6 alkyl, X is C1-C6 alkylene, Y is C1-C6 alkylene. The invention further relates to a process for imaging a photoresist coated over the antireflective coating composition.
公开/授权文献
- US20090280435A1 Antireflective coating composition 公开/授权日:2009-11-12
信息查询
IPC分类: