发明授权
US07951696B2 Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes 失效
使用非接触印刷方法同时形成N型和P型掺杂区的方法

Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes
摘要:
Methods for simultaneously forming doped regions of opposite conductivity using non-contact printing processes are provided. In one exemplary embodiment, a method comprises the steps of depositing a first liquid dopant comprising first conductivity-determining type dopant elements overlying a first region of a semiconductor material and depositing a second liquid dopant comprising second conductivity-determining type dopant elements overlying a second region of the semiconductor material. The first conductivity-determining type dopant elements and the second conductivity-determining type dopant elements are of opposite conductivity. At least a portion of the first conductivity-determining type dopant elements and at least a portion of the second conductivity-determining type dopant elements are simultaneously diffused into the first region and into the second region, respectively.
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