Invention Grant
- Patent Title: Photoresist composition and method of manufacturing a thin-film transistor substrate using the same
- Patent Title (中): 光刻胶组合物及使用其制造薄膜晶体管基板的方法
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Application No.: US11554194Application Date: 2006-10-30
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Publication No.: US07955784B2Publication Date: 2011-06-07
- Inventor: Hi-Kuk Lee , Woo-Seok Jeon , Doo-Hee Jung , Jeong-Min Park , Deok-Man Kang , Si-Young Jung , Jae-Young Choi
- Applicant: Hi-Kuk Lee , Woo-Seok Jeon , Doo-Hee Jung , Jeong-Min Park , Deok-Man Kang , Si-Young Jung , Jae-Young Choi
- Applicant Address: KR JP
- Assignee: Samsung Electronics Co., Ltd.,AZ Electronic Materials (Japan) K.K.
- Current Assignee: Samsung Electronics Co., Ltd.,AZ Electronic Materials (Japan) K.K.
- Current Assignee Address: KR JP
- Agency: Cantor Colburn LLP
- Priority: KR10-2005-0102942 20051031
- Main IPC: G03F7/30
- IPC: G03F7/30

Abstract:
A photoresist composition includes about 100 parts by weight of resin mixture including novolak resin and acryl resin and about 10 parts to about 50 parts by weight of naphthoquinone diazosulfonic acid ester. A weight-average molecular weight of the novolak resin is no less than about 30,000. A weight-average molecular weight of the acryl resin is no less than about 20,000. The acryl resin makes up about 1% to about 15% of the total weight of the resin mixture. When a photoresist film formed using the photoresist composition is heated, a profile variation of the photoresist composition is relatively small. Therefore, a residual photoresist film has a uniform thickness, and a short circuit and/or an open defect in a TFT substrate may be reduced.
Public/Granted literature
- US20070259272A1 PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A THIN-FILM TRANSISTOR SUBSTRATE USING THE SAME Public/Granted day:2007-11-08
Information query
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