Photoresist composition and method of manufacturing a thin-film transistor substrate using the same
    1.
    发明授权
    Photoresist composition and method of manufacturing a thin-film transistor substrate using the same 有权
    光刻胶组合物及使用其制造薄膜晶体管基板的方法

    公开(公告)号:US07955784B2

    公开(公告)日:2011-06-07

    申请号:US11554194

    申请日:2006-10-30

    IPC分类号: G03F7/30

    摘要: A photoresist composition includes about 100 parts by weight of resin mixture including novolak resin and acryl resin and about 10 parts to about 50 parts by weight of naphthoquinone diazosulfonic acid ester. A weight-average molecular weight of the novolak resin is no less than about 30,000. A weight-average molecular weight of the acryl resin is no less than about 20,000. The acryl resin makes up about 1% to about 15% of the total weight of the resin mixture. When a photoresist film formed using the photoresist composition is heated, a profile variation of the photoresist composition is relatively small. Therefore, a residual photoresist film has a uniform thickness, and a short circuit and/or an open defect in a TFT substrate may be reduced.

    摘要翻译: 光致抗蚀剂组合物包括约100重量份的包括酚醛清漆树脂和丙烯酸树脂的树脂混合物和约10重量份至约50重量份的萘醌重氮磺酸酯。 酚醛清漆树脂的重均分子量不小于约30,000。 丙烯酸树脂的重均分子量不小于约20,000。 丙烯酸树脂占树脂混合物总重量的约1%至约15%。 当使用光致抗蚀剂组合物形成的光致抗蚀剂膜被加热时,光致抗蚀剂组合物的轮廓变化相对较小。 因此,残留的光致抗蚀剂膜具有均匀的厚度,并且可能减小TFT基板中的短路和/或开路缺陷。

    Manufacturing method of thin film transistor array panel using an optical mask
    4.
    发明授权
    Manufacturing method of thin film transistor array panel using an optical mask 有权
    使用光掩模的薄膜晶体管阵列面板的制造方法

    公开(公告)号:US07371592B2

    公开(公告)日:2008-05-13

    申请号:US11313150

    申请日:2005-12-19

    IPC分类号: H01L21/66

    摘要: A method for manufacturing a thin film transistor array panel using a photo mask is provided. The photo mask includes: a transmitting area and a translucent area, wherein the translucent area includes a plurality of light blocking portions blocking light, and wherein the light blocking portions have a plurality of areas blocking different amounts of light. By using this type of photo mask, a substantially flat layer of photoresist film can be deposited even on top of an uneven surface to manufacture a thin film transistor array panel. The flat photoresist film reduces processing cost and enhances the reliability of the panel manufacturing process.

    摘要翻译: 提供一种使用光掩模制造薄膜晶体管阵列面板的方法。 光掩模包括:透射区域和半透明区域,其中半透明区域包括阻挡光的多个遮光部分,并且其中遮光部分具有阻挡不同量的光的多个区域。 通过使用这种类型的光掩模,即使在不平坦表面的顶部也可沉积基本平坦的光致抗蚀剂层,以制造薄膜晶体管阵列面板。 平坦的光致抗蚀剂膜降低了加工成本并提高了面板制造工艺的可靠性。

    MANUFACTURING METHOD OF THIN FILM TRANSISTOR ARRAY PANEL USING AN OPTICAL MASK
    5.
    发明申请
    MANUFACTURING METHOD OF THIN FILM TRANSISTOR ARRAY PANEL USING AN OPTICAL MASK 审中-公开
    使用光学掩模制造薄膜晶体管阵列面板的制造方法

    公开(公告)号:US20080199788A1

    公开(公告)日:2008-08-21

    申请号:US12105918

    申请日:2008-04-18

    IPC分类号: G03F1/14

    摘要: A photo mask is provided. The mask includes: a transmitting area and a translucent area, wherein the translucent area includes a plurality of light blocking portions blocking light, and wherein the light blocking portions have a plurality of areas blocking different amounts of light. By using this type of photo mask, a substantially flat layer of photoresist film can be deposited even on top of an uneven surface. The flat photoresist film reduces processing cost and enhances the reliability of the panel manufacturing process.

    摘要翻译: 提供照片面具。 掩模包括:透射区域和半透明区域,其中半透明区域包括阻挡光的多个遮光部分,并且其中遮光部分具有阻挡不同量的光的多个区域。 通过使用这种类型的光掩模,即使在不平坦表面的顶部也可沉积基本平坦的光致抗蚀剂层。 平坦的光致抗蚀剂膜降低了加工成本并提高了面板制造工艺的可靠性。

    PHOTORESIST RESIN, AND METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING DISPLAY PANEL USING THE SAME
    7.
    发明申请
    PHOTORESIST RESIN, AND METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING DISPLAY PANEL USING THE SAME 审中-公开
    光电树脂,以及形成图案的方法和使用其制造显示面板的方法

    公开(公告)号:US20090258497A1

    公开(公告)日:2009-10-15

    申请号:US12389296

    申请日:2009-02-19

    IPC分类号: H01L21/311 G03F7/00

    CPC分类号: G03F7/0236 G03F7/0007

    摘要: A photoresist resin composition, a method for forming a pattern and a method for manufacturing a display panel using the photoresist resin composition are disclosed. The photoresist resin composition includes an alkali soluble resin, a photoresist compound, and a solvent, wherein the alkali soluble resin includes a first polymer resin represented by the following Chemical Formula 1, wherein, of R1, R2, R3, R4, R5 and R6, at least one is a hydroxyl group, at least two are methyl groups and any remaining groups are hydrogen, and of R7, R8, R9, R10 and R11, at least one is a hydroxyl group, at least two are methyl groups and any remaining groups are hydrogen.

    摘要翻译: 公开了光致抗蚀剂树脂组合物,形成图案的方法和使用该光致抗蚀剂树脂组合物的显示面板的制造方法。 光致抗蚀剂树脂组合物包括碱溶性树脂,光致抗蚀剂化合物和溶剂,其中碱溶性树脂包括由以下化学式1表示的第一聚合物树脂,其中R1,R2,R3,R4,R5和R6 至少一个是羟基,至少两个是甲基,任何剩余的基团是氢,R7,R8,R9,R10和R11中的至少一个是羟基,至少两个是甲基,任何 剩余的基团是氢。

    MANUFACTURING THIN FILM TRANSISTOR ARRAY PANELS FOR FLAT PANEL DISPLAYS
    9.
    发明申请
    MANUFACTURING THIN FILM TRANSISTOR ARRAY PANELS FOR FLAT PANEL DISPLAYS 有权
    制造平板显示器的薄膜晶体管阵列面板

    公开(公告)号:US20110269253A1

    公开(公告)日:2011-11-03

    申请号:US13179436

    申请日:2011-07-08

    IPC分类号: H01L33/08

    摘要: A thin film transistor array panel for a flat panel display includes a substrate, a first signal line formed on the substrate, a second signal line intersecting and insulated from the first signal line, a switching element having a first terminal connected to the first signal line, a second terminal connected to the second signal line, and a third terminal, a pixel electrode connected to the third terminal of the switching element, and first and second light blocking members extending parallel to the second signal line, each being disposed on an opposite side of and partially overlapping an respective edge of the second signal line, an interval between the first and second light blocking members being in a range of from more than 1.5 μm to less than 4 μm. The array panel prevents light leakage from the display and improves its transmittance, aperture ratio and color reproducibility.

    摘要翻译: 一种用于平板显示器的薄膜晶体管阵列面板包括:衬底,形成在衬底上的第一信号线,与第一信号线相交和绝缘的第二信号线;开关元件,具有连接到第一信号线 ,连接到第二信号线的第二端子,以及第三端子,连接到开关元件的第三端子的像素电极,以及平行于第二信号线延伸的第一和第二遮光部件, 并且部分地与第二信号线的相应边缘重叠,第一和第二遮光构件之间的间隔在大于1.5μm至小于4μm的范围内。 阵列面板可防止显示屏漏光,提高透光率,开口率和色彩再现性。

    Manufacturing thin film transistor array panels for flat panel displays
    10.
    发明授权
    Manufacturing thin film transistor array panels for flat panel displays 有权
    制造用于平板显示器的薄膜晶体管阵列面板

    公开(公告)号:US08004636B2

    公开(公告)日:2011-08-23

    申请号:US12220145

    申请日:2008-07-22

    摘要: A thin film transistor array panel for a flat panel display includes a substrate, a first signal line formed on the substrate, a second signal line intersecting and insulated from the first signal line, a switching element having a first terminal connected to the first signal line, a second terminal connected to the second signal line, and a third terminal, a pixel electrode connected to the third terminal of the switching element, and first and second light blocking members extending parallel to the second signal line, each being disposed on an opposite side of and partially overlapping an respective edge of the second signal line, an interval between the first and second light blocking members being in a range of from more than 1.5 μm to less than 4 μm. The array panel prevents light leakage from the display and improves its transmittance, aperture ratio and color reproducibility.

    摘要翻译: 一种用于平板显示器的薄膜晶体管阵列面板包括:衬底,形成在衬底上的第一信号线,与第一信号线相交和绝缘的第二信号线;开关元件,具有连接到第一信号线 ,连接到第二信号线的第二端子,以及第三端子,连接到开关元件的第三端子的像素电极,以及平行于第二信号线延伸的第一和第二遮光部件, 并且部分地与第二信号线的相应边缘重叠,第一和第二遮光构件之间的间隔在大于1.5μm至小于4μm的范围内。 阵列面板可防止显示屏漏光,提高透光率,开口率和色彩再现性。