- 专利标题: Laser diode array, method of manufacturing same, printer, and optical communication device
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申请号: US12219491申请日: 2008-07-23
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公开(公告)号: US07960195B2公开(公告)日: 2011-06-14
- 发明人: Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
- 申请人: Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Rader, Fishman & Grauer PLLC
- 优先权: JP2007-216401 20070822
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/98 ; H01S5/18 ; H01S5/183 ; H01S5/187 ; H01S5/22
摘要:
A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
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