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公开(公告)号：US08488647B2
公开(公告)日：2013-07-16
申请号：US12923634
申请日：2010-09-30
申请人： Takahiro Arakida , Shiro Uchida , Masaki Shiozaki , Osamu Maeda
发明人： Takahiro Arakida , Shiro Uchida , Masaki Shiozaki , Osamu Maeda
IPC分类号： H01S5/00
CPC分类号： H01S5/0264 , H01S5/18313 , H01S5/18325
摘要： The present invention provides a semiconductor light emitting device realizing increased light detection precision by a simple manufacture process. One or more second oxidation layers are provided between an active layer and a semiconductor light detecting element in addition to a first oxidation layer for narrowing current. Since natural emission light includes many divergence components, the natural emission light is reflected and scattered by the second oxidation layer, and propagation of the natural emission light to the semiconductor light detecting element side is suppressed. The detection level of the natural emission light by the semiconductor light detecting element decreases, and light detection precision increases. The first and second oxidation layers are formed by a single oxidizing process so that the manufacturing process is simplified.
摘要翻译： 本发明提供一种通过简单的制造工艺实现增加的光检测精度的半导体发光器件。 除了用于变窄的电流的第一氧化层之外，在有源层和半导体光检测元件之间提供一个或多个第二氧化层。 由于天然发射光包含许多发散分量，所以天然发射光被第二氧化层反射和散射，并且抑制了将自然发射光传播到半导体光检测元件侧。 半导体光检测元件的自然发光的检测水平降低，光检测精度提高。 第一和第二氧化层通过单一氧化工艺形成，从而简化了制造工艺。
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2.发明申请Laser diode array, method of manufacturing same, printer, and optical communication device 有权激光二极管阵列，制造方法，打印机和光通信装置公开(公告)号：US20110164646A1
公开(公告)日：2011-07-07
申请号：US13064218
申请日：2011-03-11
申请人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
发明人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
CPC分类号： H01S5/423 , H01L2224/18 , H01L2224/24137 , H01L2224/73267 , H01S5/0217 , H01S5/02272 , H01S5/02276 , H01S5/042 , H01S5/0425 , H01S5/18311 , H01S5/18341 , H01S5/1838 , H01S5/187 , H01S5/34313 , H01S2304/04 , Y10S438/977
摘要： A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
摘要翻译： 提供一种制造能够抑制串扰的激光二极管阵列的方法。 制造激光二极管阵列的方法包括以下步骤：通过晶体生长从第一衬底侧顺序地在第一衬底上形成含有可氧化材料和垂直谐振器结构的剥离层，然后选择性地蚀刻剥离层和垂直 谐振器结构，从而处理成柱状，从侧面氧化剥离层的剥离步骤，然后从第一基板剥离柱状的垂直共振器结构，以及重新连接步骤，连接多个 将通过剥离步骤获得的柱状垂直共振器结构施加到在表面上形成有金属层的第二基板的金属层的表面上。
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公开(公告)号：US20110096806A1
公开(公告)日：2011-04-28
申请号：US12923634
申请日：2010-09-30
申请人： Takahiro Arakida , Shiro Uchida , Masaki Shiozaki , Osamu Maeda
发明人： Takahiro Arakida , Shiro Uchida , Masaki Shiozaki , Osamu Maeda
IPC分类号： H01S5/02
CPC分类号： H01S5/0264 , H01S5/18313 , H01S5/18325
摘要： The present invention provides a semiconductor light emitting device realizing increased light detection precision by a simple manufacture process. One or more second oxidation layers are provided between an active layer and a semiconductor light detecting element in addition to a first oxidation layer for narrowing current. Since natural emission light includes many divergence components, the natural emission light is reflected and scattered by the second oxidation layer, and propagation of the natural emission light to the semiconductor light detecting element side is suppressed. The detection level of the natural emission light by the semiconductor light detecting element decreases, and light detection precision increases. The first and second oxidation layers are formed by a single oxidizing process so that the manufacturing process is simplified.
摘要翻译： 本发明提供一种通过简单的制造工艺实现增加的光检测精度的半导体发光器件。 除了用于变窄的电流的第一氧化层之外，在有源层和半导体光检测元件之间提供一个或多个第二氧化层。 由于天然发射光包含许多发散分量，所以天然发射光被第二氧化层反射和散射，并且抑制了将自然发射光传播到半导体光检测元件侧。 半导体光检测元件的自然发光的检测水平降低，光检测精度提高。 第一和第二氧化层通过单一氧化工艺形成，从而简化了制造工艺。
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4.发明申请Laser diode array, method of manufacturing same, printer, and optical communication device 有权激光二极管阵列，制造方法，打印机和光通信装置公开(公告)号：US20090052490A1
公开(公告)日：2009-02-26
申请号：US12219491
申请日：2008-07-23
申请人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
发明人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
CPC分类号： H01S5/423 , H01L2224/18 , H01L2224/24137 , H01L2224/73267 , H01S5/0217 , H01S5/02272 , H01S5/02276 , H01S5/042 , H01S5/0425 , H01S5/18311 , H01S5/18341 , H01S5/1838 , H01S5/187 , H01S5/34313 , H01S2304/04 , Y10S438/977
摘要： A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
摘要翻译： 提供一种制造能够抑制串扰的激光二极管阵列的方法。 制造激光二极管阵列的方法包括以下步骤：通过晶体生长从第一衬底侧顺序地在第一衬底上形成含有可氧化材料和垂直谐振器结构的剥离层，然后选择性地蚀刻剥离层和垂直 谐振器结构，从而处理成柱状，从侧面氧化剥离层的剥离步骤，然后从第一基板剥离柱状的垂直共振器结构，以及重新连接步骤，连接多个 将通过剥离步骤获得的柱状垂直共振器结构施加到在表面上形成有金属层的第二基板的金属层的表面上。
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5.发明授权公开(公告)号：US08363689B2
公开(公告)日：2013-01-29
申请号：US13064218
申请日：2011-03-11
申请人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
发明人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
IPC分类号： H01S5/187
CPC分类号： H01S5/423 , H01L2224/18 , H01L2224/24137 , H01L2224/73267 , H01S5/0217 , H01S5/02272 , H01S5/02276 , H01S5/042 , H01S5/0425 , H01S5/18311 , H01S5/18341 , H01S5/1838 , H01S5/187 , H01S5/34313 , H01S2304/04 , Y10S438/977
摘要： A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.
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公开(公告)号：US08435815B2
公开(公告)日：2013-05-07
申请号：US12926917
申请日：2010-12-17
申请人： Masaki Shiozaki , Osamu Maeda , Takahiro Arakida , Susumu Sato
发明人： Masaki Shiozaki , Osamu Maeda , Takahiro Arakida , Susumu Sato
IPC分类号： B82Y20/00
CPC分类号： H01S5/18355 , H01S5/18313 , H01S5/1833 , H01S5/18338 , H01S5/18358
摘要： A manufacturing method of a surface-emitting semiconductor laser includes the steps of: forming a stacked structure having a lower-multilayer film reflector including a lower oxidizable layer having at least one layer, an active layer having a light emitting region, an upper-multilayer film reflector including an upper oxidizable layer and an upper layer on a substrate in this order; providing a first groove in the upper layer; and providing a second groove including a portion overlapping the first groove in a planar shape and a portion not overlapping the first groove in the stacked structure.
摘要翻译： 表面发射半导体激光器的制造方法包括以下步骤：形成具有下层多层膜反射体的层叠结构，所述下多层膜反射体包括具有至少一层的下部可氧化层，具有发光区域的有源层，上部多层膜 膜反射器，其依次包括基板上的上部可氧化层和上层; 在上层提供第一凹槽; 并且在所述堆叠结构中设置包括与所述第一凹槽重叠的部分的平面形状的第二凹槽和不与所述第一凹槽重叠的部分。
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公开(公告)号：US08098703B2
公开(公告)日：2012-01-17
申请号：US12656427
申请日：2010-01-29
申请人： Osamu Maeda , Yuji Masui , Masaki Shiozaki , Susumu Sato , Takahiro Arakida
发明人： Osamu Maeda , Yuji Masui , Masaki Shiozaki , Susumu Sato , Takahiro Arakida
IPC分类号： H01S5/00
CPC分类号： H01S5/18313 , B82Y20/00 , H01S5/02276 , H01S5/0425 , H01S5/0607 , H01S5/18311 , H01S5/1833 , H01S5/18355 , H01S5/18369 , H01S5/18377 , H01S5/18391 , H01S5/32325 , H01S5/32341 , H01S5/3404 , H01S5/3432 , H01S5/423 , H01S2301/166 , H01S2304/04
摘要： A laser diode allowed to stabilize the polarization direction of laser light in one direction is provided. The laser diode includes a laminate configuration including a lower multilayer reflecting mirror, an active layer and an upper multilayer reflecting mirror in order from a substrate side, in which the laminate configuration includes a columnar mesa section including an upper part of the lower multilayer reflecting mirror, the active layer and the upper multilayer reflecting mirror, and the lower multilayer reflecting mirror includes a plurality of pairs of a low refractive index layer and a high refractive index layer, and a plurality of oxidation layers nonuniformly distributed in a direction rotating around a central axis of the mesa section in a region except for a central region of one or more of the low refractive index layers.
摘要翻译： 提供允许在一个方向上稳定激光的偏振方向的激光二极管。 激光二极管包括从基板侧起按顺序包括下层多层反射镜，有源层和上多层反射镜的叠层结构，其中层叠结构包括柱状台面部分，该柱状台面部分包括下多层反射镜的上部 有源层和上层多层反射镜以及下层多层反射镜包括多对低折射率层和高折射率层，以及多个氧化层，其不均匀分布在围绕中心的方向上旋转 在除了一个或多个低折射率层的中心区域之外的区域中的台面部分的轴线。
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公开(公告)号：US20100040104A1
公开(公告)日：2010-02-18
申请号：US12458754
申请日：2009-07-22
IPC分类号： H01S5/183
CPC分类号： H01S5/18327 , H01S5/02461 , H01S5/1221 , H01S5/18311 , H01S5/18358 , H01S5/18391 , H01S2301/166 , H01S2304/02 , H01S2304/04
摘要： The present invention provides a Vertical Cavity Surface Emitting Laser including: a first multilayer film reflector; an active layer having a light emission region; a second multilayer film reflector; and a reflectance adjustment layer in this order on a substrate side. The first multilayer film reflector and the second multilayer film reflector have a laminated structure in which reflectance of oscillation wavelength λx is almost constant without depending on temperature change. The active layer is made of a material with which a maximum gain is obtained at temperature higher than ambient temperature. The reflectance adjustment layer has a laminated structure in which difference ΔR(=Rx−Ry) between reflectance Rx of a region opposed to a central region of the light emission region and reflectance Ry of a region opposed to an outer edge region of the light emission region is increased associated with temperature increase from ambient temperature to high temperature.
摘要翻译： 本发明提供一种垂直腔表面发射激光器，包括：第一多层膜反射器; 具有发光区域的有源层; 第二多层膜反射器; 和反射率调整层。 第一多层膜反射器和第二多层膜反射器具有振荡波长λx的反射率几乎恒定而不依赖于温度变化的层叠结构。 有源层由在高于环境温度的温度下获得最大增益的材料制成。 反射率调整层具有层叠结构，其中与发光区域的中心区域相对的区域的反射率Rx与与发光区域的外边缘区域相对的区域的反射率Ry之间的差Dgr R（= Rx-Ry） 发光区域随温度从环境温度升高到高温而增加。
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公开(公告)号：US20090180506A1
公开(公告)日：2009-07-16
申请号：US12318421
申请日：2008-12-29
申请人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
发明人： Osamu Maeda , Masaki Shiozaki , Takahiro Arakida
IPC分类号： H01S5/183
CPC分类号： H01S5/18394 , H01S5/0425 , H01S5/18311 , H01S5/18327 , H01S5/18347 , H01S5/18358 , H01S2301/166 , H01S2301/176
摘要： A Vertical Cavity Surface Emitting Laser (VCSEL) capable of providing high output of fundamental transverse mode while preventing oscillation of high-order transverse mode is provided. The VCSEL includes a semiconductor layer including an active layer and a current confinement layer, and a transverse mode adjustment section formed on the semiconductor layer. The current confinement layer has a current injection region and a current confinement region. The transverse mode adjustment section has a high reflectance area and a low reflectance area. The high reflectance area is formed in a region including a first opposed region opposing to a center point of the current injection region. A center point of the high reflectance area is arranged in a region different from the first opposed region. The low reflectance area is formed in a region where the high reflectance area is not formed, in an opposed region opposing to the current injection region.
摘要翻译： 提供了能够提供高输出基本横模的垂直腔面发射激光器（VCSEL），同时防止高阶横模的振荡。 VCSEL包括形成在半导体层上的包括有源层和电流限制层的半导体层和横向模式调整部。 电流限制层具有电流注入区域和电流限制区域。 横模调整部具有高反射面积和低反射面积。 高反射率区域形成在包括与电流注入区域的中心点相对的第一相对区域的区域中。 高反射率区域的中心点布置在与第一相对区域不同的区域中。 在与电流注入区域相对的相对区域中，在没有形成高反射率区域的区域中形成低反射率区域。
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公开(公告)号：US20080240194A1
公开(公告)日：2008-10-02
申请号：US12076791
申请日：2008-03-24
CPC分类号： H01S5/18355 , H01S5/0425 , H01S5/1017 , H01S5/18311 , H01S5/18313 , H01S5/18333 , H01S5/18391 , H01S2301/14
摘要： A VSCEL capable of being easily and inexpensively manufactured and of stabilizing the polarization direction of laser light in one direction is provided. The Vertical Cavity Surface Emitting Laser includes a semiconductor lamination structure including a first multilayer film reflector, an active layer having a light emitting region, and a second multilayer film reflector in this order over a substrate from the substrate side. The semiconductor lamination structure has a pair of grooves provided with a region opposed to the light emitting region in between, and one or a plurality of first oxidation layers including a first non-oxidation region provided at least in a region opposed to the light emitting region and a first oxidation region provided on each side face of the pair of grooves.
摘要翻译： 提供了能够容易且廉价地制造并且在一个方向上稳定激光的偏振方向的VSCEL。 垂直空腔表面发射激光器包括从基板侧在基板上依次包括第一多层膜反射器，具有发光区域的有源层和第二多层膜反射器的半导体层叠结构。 半导体层叠结构具有设置有与其间的发光区域相对的区域的一对沟槽，以及包括至少设置在与发光区域相对的区域中的第一非氧化区域的一个或多个第一氧化层 以及设置在所述一对槽的每个侧面上的第一氧化区域。
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