发明授权
US07984690B2 Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium 有权
液体处理装置,杯体的安装和拆卸方法以及存储介质

Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
摘要:
A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.
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