发明授权
US07984690B2 Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
有权
液体处理装置,杯体的安装和拆卸方法以及存储介质
- 专利标题: Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
- 专利标题(中): 液体处理装置,杯体的安装和拆卸方法以及存储介质
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申请号: US11907291申请日: 2007-10-10
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公开(公告)号: US07984690B2公开(公告)日: 2011-07-26
- 发明人: Tsunenaga Nakashima , Gouichi Iwao , Naofumi Kishita , Nobuhiro Ogata
- 申请人: Tsunenaga Nakashima , Gouichi Iwao , Naofumi Kishita , Nobuhiro Ogata
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2006-287966 20061023; JP2007-119541 20070427
- 主分类号: B05B15/04
- IPC分类号: B05B15/04 ; B05C11/02
摘要:
A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.
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