公开(公告)号：US20110220216A1

公开(公告)日：2011-09-15

申请号：US13114346

申请日：2011-05-24

申请人： Tsunenaga NAKASHIMA ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

发明人： Tsunenaga NAKASHIMA ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

IPC分类号： B23P11/00

CPC分类号： G03F7/162 ,  Y10T137/0402

摘要： A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

摘要翻译： 一种液体处理装置，通过从供给喷嘴向所述表面供给处理液，处理基本上水平地保持在壳体的台架上的基板的表面。 液体处理装置包括：杯体，其设置成围绕保持在基板保持部的基板侧面，杯体从其上方可拆卸地安装在壳体内的基座上; 可拆卸地保持杯体的杯体保持部; 以及升降机构，其在所述杯体安装在所述基体上的第一位置与位于所述第一位置上方的第二位置之间上下移动所述杯体保持部。

公开(公告)号：US20080092813A1

公开(公告)日：2008-04-24

申请号：US11907291

申请日：2007-10-10

申请人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

发明人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

IPC分类号： B05B7/00 ,  B05C11/00 ,  B66B17/00

CPC分类号： G03F7/162 ,  Y10T137/0402

摘要： A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

摘要翻译： 一种液体处理装置，通过从供给喷嘴向所述表面供给处理液，处理基本上水平地保持在壳体的台架上的基板的表面。 液体处理装置包括：杯体，其设置成围绕保持在基板保持部的基板侧面，杯体从其上方可拆卸地安装在壳体内的基座上; 可拆卸地保持杯体的杯体保持部; 以及升降机构，其在所述杯体安装在所述基体上的第一位置与位于所述第一位置上方的第二位置之间上下移动所述杯体保持部。

公开(公告)号：US08354141B2

公开(公告)日：2013-01-15

申请号：US13114346

申请日：2011-05-24

申请人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

发明人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

IPC分类号： B05D3/12

CPC分类号： G03F7/162 ,  Y10T137/0402

摘要： A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

摘要翻译： 一种液体处理装置，通过从供给喷嘴向所述表面供给处理液，处理基本上水平地保持在壳体的台架上的基板的表面。 液体处理装置包括：杯体，其设置成围绕保持在基板保持部的基板侧面，杯体从其上方可拆卸地安装在壳体内的基座上; 可拆卸地保持杯体的杯体保持部; 以及升降机构，其在所述杯体安装在所述基体上的第一位置与位于所述第一位置上方的第二位置之间上下移动所述杯体保持部。

公开(公告)号：US07984690B2

公开(公告)日：2011-07-26

申请号：US11907291

申请日：2007-10-10

申请人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

发明人： Tsunenaga Nakashima ,  Gouichi Iwao ,  Naofumi Kishita ,  Nobuhiro Ogata

IPC分类号： B05B15/04 ,  B05C11/02

CPC分类号： G03F7/162 ,  Y10T137/0402

摘要： A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

摘要翻译： 一种液体处理装置，通过从供给喷嘴向所述表面供给处理液，处理基本上水平地保持在壳体的台架上的基板的表面。 液体处理装置包括：杯体，其设置成围绕保持在基板保持部的基板侧面，杯体从其上方可拆卸地安装在壳体内的基座上; 可拆卸地保持杯体的杯体保持部; 以及升降机构，其在所述杯体安装在所述基体上的第一位置与位于所述第一位置上方的第二位置之间上下移动所述杯体保持部。