Invention Grant
US07985453B2 Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same 失效
用于校准光学扫描仪的装置,其制造方法以及使用其的校准光学扫描器的方法

Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same
Abstract:
A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.
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