发明授权
US07986075B2 Film bulk acoustic wave resonator, its fabrication method and film bulk acoustic wave resonator filter using the resonator 失效
薄膜体声波谐振器,其制造方法和使用谐振器的薄膜体声波谐振器滤波器

Film bulk acoustic wave resonator, its fabrication method and film bulk acoustic wave resonator filter using the resonator
摘要:
The film bulk acoustic wave resonator includes a laminate structure composed of a piezoelectric layer, and first and second electrode layers interposing at least part of the piezoelectric layer, in which the first metal electrode is dispersively formed on an electrode plane facing the second metal electrode, and a gap is formed in a substrate correspondingly to the laminate-structured resonance part. Except for an area of a wire electrode electrically connected to the first electrode layer and an area of a wire electrode electrically connected to the second electrode layer, the piezoelectric layer, first electrode layer and second electrode layer do not come in contact with the insulating substrate but are supported on a hollow. Also, a prop is formed in the gap to support the laminate structure.
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