发明授权
- 专利标题: Diamond like carbon coating of substrate housings
- 专利标题(中): 钻石像碳涂层的基板外壳
-
申请号: US12515606申请日: 2007-06-14
-
公开(公告)号: US08012586B2公开(公告)日: 2011-09-06
- 发明人: Charles W. Extrand , Sung In Moon
- 申请人: Charles W. Extrand , Sung In Moon
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 国际申请: PCT/US2007/013909 WO 20070614
- 国际公布: WO2008/063241 WO 20080529
- 主分类号: B09B3/00
- IPC分类号: B09B3/00 ; H01L23/58
摘要:
Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.
公开/授权文献
- US20100017346A1 DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS 公开/授权日:2010-01-21
信息查询