DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
    1.
    发明申请
    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS 有权
    金刚石类似于基材外壳的碳涂层

    公开(公告)号:US20100017346A1

    公开(公告)日:2010-01-21

    申请号:US12515606

    申请日:2007-06-14

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    摘要翻译: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。

    Diamond like carbon coating of substrate housings

    公开(公告)号:US08426024B2

    公开(公告)日:2013-04-23

    申请号:US13194636

    申请日:2011-07-29

    IPC分类号: B09B3/00 H01L23/58

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
    3.
    发明申请
    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS 失效
    金刚石类似于基材外壳的碳涂层

    公开(公告)号:US20110281116A1

    公开(公告)日:2011-11-17

    申请号:US13194636

    申请日:2011-07-29

    IPC分类号: B32B27/36 B32B9/00

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    摘要翻译: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。

    Diamond like carbon coating of substrate housings
    4.
    发明授权
    Diamond like carbon coating of substrate housings 有权
    钻石像碳涂层的基板外壳

    公开(公告)号:US08012586B2

    公开(公告)日:2011-09-06

    申请号:US12515606

    申请日:2007-06-14

    IPC分类号: B09B3/00 H01L23/58

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    摘要翻译: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。

    ARTICLES COMPRISING WETTABLE STRUCTURED SURFACES
    5.
    发明申请
    ARTICLES COMPRISING WETTABLE STRUCTURED SURFACES 审中-公开
    包含可湿性结构表面的文章

    公开(公告)号:US20100136289A1

    公开(公告)日:2010-06-03

    申请号:US12600670

    申请日:2008-05-19

    IPC分类号: B32B3/10

    CPC分类号: H01M8/0202 Y10T428/24355

    摘要: Embodiments of the invention include or comprise super wetting structured surfaces having one or more asperities, sometimes referred to as hemi-wicking. Structured substrates with regular arrays of asperities such as square pillars or frustra were machined from graphite blocks and then treated to render them lyophilic. Liquids spread over these surfaces to produce non-circular wetting areas. As the channels formed between the asperities were made shallower or narrower, liquids wicked more and spread over a larger area. The inherent wettability of the substrate was independent or nearly independent of the substrate. A combination of the appropriate surface structure and moderate inherent wettability can effectively flatten liquids, spreading them over very large areas.

    摘要翻译: 本发明的实施例包括或包括具有一个或多个凹凸的超润湿结构化表面,有时称为半芯吸。 具有规则阵列的诸如方柱或frustra的具有规则阵列的结构化基底由石墨块加工,然后进行处理以使其具有亲液性。 液体散布在这些表面上以产生非圆形润湿区域。 由于凹凸之间形成的沟道变得更浅或更窄,液体会越来越多,越来越大。 衬底的固有润湿性是独立的或几乎不依赖于衬底。 合适的表面结构和适度固有的润湿性的组合可以有效地使液体平坦化,将其铺展在非常大的区域上。