DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
    1.
    发明申请
    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS 失效
    金刚石类似于基材外壳的碳涂层

    公开(公告)号:US20110281116A1

    公开(公告)日:2011-11-17

    申请号:US13194636

    申请日:2011-07-29

    IPC分类号: B32B27/36 B32B9/00

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    摘要翻译: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。

    FLUID HANDLING DEVICE WITH DIRECTIONALLY-BIASED WETTING SURFACE
    2.
    发明申请
    FLUID HANDLING DEVICE WITH DIRECTIONALLY-BIASED WETTING SURFACE 失效
    流体处理装置具有方向漂白的表面

    公开(公告)号:US20090217981A1

    公开(公告)日:2009-09-03

    申请号:US12066945

    申请日:2006-09-15

    IPC分类号: F15D1/00 H01M8/02 B08B3/00

    摘要: A fluid handling device with an anisotropic wetting surface including a substrate with a multiplicity of asymmetric substantially uniformly shaped asperities thereon. Each asperity has a first asperity rise angle and a second asperity rise angle relative to the substrate. The asperities are structured to present a desired retentive force ratio (f1/f2) greater or less than unity caused by asymmetry between the first asperity rise angle and the second asperity rise angle according to the formula: f3/f2=sin(ω3+½Δθ0)/sin(ω2+½Δθ0).

    摘要翻译: 一种具有各向异性润湿表面的流体处理装置,其包括在其上具有多个不对称的基本均匀形状的凹凸的基底。 每个粗糙度具有相对于基底的第一粗糙度上升角和第二粗糙度上升角。 凹凸被构造成呈现由以下公式在第一粗糙度上升角和第二粗糙度上升角之间的不对称性大于或小于单位的期望的保持力比(f1 / f2):f3 / f2 = sin(ω3+½Deltatheta0 )/ sin(omega2 +½Deltatheta0)。

    Matrix tray with tacky surfaces
    3.
    发明授权
    Matrix tray with tacky surfaces 有权
    具有粘性表面的矩阵托盘

    公开(公告)号:US06926937B2

    公开(公告)日:2005-08-09

    申请号:US10241815

    申请日:2002-09-11

    摘要: A tray for handling and retaining a plurality of small components comprising a rigid body portion with a plurality of pockets formed therein. Each of the pockets has an elastomeric contact surface for contacting and retaining a component. The contact surface may be formed from a thermoplastic material having a surface energy between 20 dyne/cm and 100 dyne/cm, and a surface electrical resistivity of between about 1×104 ohms/square and 1×1012 ohms/square. The material for the contact portion may be urethane, polybutylene terephthalate, polyolefin, polyethylene terephthalate, styrenic block co-polymer, styrene-butadiene rubber, polyether block polyamide, or polypropylene/crosslinked EDPM rubber. The body portion may be formed from acrylonitrile-butadiene-styrene, polycarbonate, urethane, polyphenylene sulfide, polystyrene, polymethyl methacrylate, polyetherketone, polyetheretherketone, polyetherketoneketone, polyether imide, polysulfone, styrene acrylonitrile, polyethylene, polypropylene, fluoropolymer, polyolefin, or nylon. The body portion may have a peripheral border region and a downwardly projecting skirt portion to facilitate stacking of multiple trays.

    摘要翻译: 一种用于处理和保持多个小部件的托盘,包括刚体部分,其中形成有多个凹穴。 每个口袋具有用于接触和保持部件的弹性体接触表面。 接触表面可以由表面能在20达因/厘米至100达因/厘米之间的表面电阻率和大约1×10 4欧姆/平方英寸的表面电阻率的热塑性材料形成, 12欧姆/平方英尺 用于接触部分的材料可以是聚氨酯,聚对苯二甲酸丁二醇酯,聚烯烃,聚对苯二甲酸乙二醇酯,苯乙烯嵌段共聚物,苯乙烯 - 丁二烯橡胶,聚醚嵌段聚酰胺或聚丙烯/交联的EDPM橡胶。 主体部分可以由丙烯腈 - 丁二烯 - 苯乙烯,聚碳酸酯,聚氨酯,聚苯硫醚,聚苯乙烯,聚甲基丙烯酸甲酯,聚醚酮,聚醚醚酮,聚醚酮酮,聚醚酰亚胺,聚砜,苯乙烯丙烯腈,聚乙烯,聚丙烯,含氟聚合物,聚烯烃或尼龙形成。 主体部分可以具有周边边界区域和向下突出的裙部部分,以便于堆叠多个托盘。

    Diamond like carbon coating of substrate housings

    公开(公告)号:US08426024B2

    公开(公告)日:2013-04-23

    申请号:US13194636

    申请日:2011-07-29

    IPC分类号: B09B3/00 H01L23/58

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    Wafer carrier with ultraphobic surfaces
    5.
    发明授权
    Wafer carrier with ultraphobic surfaces 失效
    超薄表面的晶圆载体

    公开(公告)号:US06976585B2

    公开(公告)日:2005-12-20

    申请号:US10454743

    申请日:2003-06-03

    CPC分类号: B08B17/06 H01L21/67366

    摘要: A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily “roll off” without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.

    摘要翻译: 具有超疏水表面的载体,用于促进载体的更有效的清洁和干燥。 在本发明中,载体的整个表面或表面的一部分被制成超疏水。 载体的超疏水表面引起可能与表面接触的液体,例如可用于清洁,以快速且容易地“滚脱”而不留下液膜或大量液滴。 结果,在干燥表面时花费更少的时间和精力,并使再沉积的残渣最小化,从而提高整体工艺质量。 此外,超疏水表面可以抵抗污染物的初始沉积,其中污染物可以是液体或蒸气形式。

    Ultraphobic surface for high pressure liquids
    6.
    发明授权
    Ultraphobic surface for high pressure liquids 有权
    用于高压液体的超疏水表面

    公开(公告)号:US06852390B2

    公开(公告)日:2005-02-08

    申请号:US10454745

    申请日:2003-06-03

    摘要: A durable ultraphobic surface that is capable of retaining ultraphobic properties at liquid pressures of one atmosphere and above. The surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed so that the surface has a predetermined contact line density measured in meters of contact line per square meter of surface area equal to or greater than a contact line density value “ΛL” determined according to the formula: Λ L = - 10 ⁢ , ⁢ 330 γcos ⁡ ( θ a , 0 + ω - 90 ⁢ ° ) where γ is the surface tension of the liquid in Newtons per meter, θa,0 is the experimentally measured true advancing contact angle of the liquid on the asperity material in degrees, and ω is the asperity rise angle in degrees.

    摘要翻译: 耐久的超疏水表面,能够在一个大气压以上的液体压力下保持超疏水性能。 表面通常包括具有多个突出的规则形状的微米级或纳米尺度凹凸的基底部分,以使得该表面具有以每米每平米表面积等于或大于接触线密度的接触线的米数测量的预定接触线密度 值“LambdaL”根据以下公式确定:其中γ是液体的表面张力,以牛顿/米为单位,θa,0是实验测量的液体在粗糙材料上的真实进给接触角,其中ω是粗糙度 上升角度以度为单位。

    Fluid handling component with ultraphobic surfaces
    7.
    发明授权
    Fluid handling component with ultraphobic surfaces 有权
    具有超疏水表面的流体处理组件

    公开(公告)号:US06845788B2

    公开(公告)日:2005-01-25

    申请号:US10454742

    申请日:2003-06-03

    摘要: A fluid handling component having a durable ultraphobic fluid contact surface that is capable of exhibiting ultraphobic properties at liquid pressures of one atmosphere and above. The surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed so that the surface has a predetermined contact line density measured in meters of contact line per square meter of surface area equal to or greater than a contact line density value “ΛL” determined according to the formula: Λ L = - 10 ⁢ , ⁢ 330 γcos ⁡ ( θ a , 0 + ω - 90 ⁢ ° ) where γ is the surface tension of the liquid in Newtons per meter, θa,0 is the experimentally measured true advancing contact angle of the liquid on the asperity material in degrees, and ω is the asperity rise angle in degrees.

    摘要翻译: 一种流体处理部件,其具有耐久的超疏水流体接触表面,其能够在一个大气压以上的液体压力下表现出超疏水性。 表面通常包括具有多个突出的规则形状的微米级或纳米尺度凹凸的基底部分,以使得该表面具有以每米每平米表面积等于或大于接触线密度的接触线的米数测量的预定接触线密度 值“LambdaL”根据以下公式确定:其中γ是液体的表面张力,以牛顿/米为单位,θa,0是实验测量的液体在粗糙材料上的真实进给接触角,其中ω是粗糙度 上升角度以度为单位。

    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
    8.
    发明申请
    DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS 有权
    金刚石类似于基材外壳的碳涂层

    公开(公告)号:US20100017346A1

    公开(公告)日:2010-01-21

    申请号:US12515606

    申请日:2007-06-14

    摘要: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

    摘要翻译: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。

    Sealing system for ports of vessels used for corrosive fluids
    9.
    发明授权
    Sealing system for ports of vessels used for corrosive fluids 失效
    用于腐蚀性液体的船舶港口的密封系统

    公开(公告)号:US07128212B2

    公开(公告)日:2006-10-31

    申请号:US10466405

    申请日:2002-01-25

    IPC分类号: B65D85/84

    CPC分类号: F16L55/1108

    摘要: A sealing system, sealing system components, and methods of manufacture and use for a vessel that holds corrosive liquid, with the sealing system having a port on the vessel, an insert, and a sealing element. The sealing element is corrosion-resistant, essentially impermeable to corrosive and critical fluids, essentially free of leachable impurities and is made with a material having a Shore A hardness between about 70 and about 95. A preferred material for the sealing ring is the class of materials known as polyolefins. The insert is operably engageable with the port and the sealing element to create a seal between the sealing element and the first and second sealing surfaces to prevent fluid flow through the port.

    摘要翻译: 密封系统,密封系统部件以及用于容纳腐蚀性液体的容器的制造和使用方法,密封系统在容器上具有端口,插入件和密封元件。 密封元件是耐腐蚀的,对腐蚀性和临界流体基本上不可渗透,基本上不含可浸出的杂质,并且由肖氏A硬度在约70至约95之间的材料制成。用于密封环的优选材料是 称为聚烯烃的材料。 插入件可操作地与端口和密封元件接合以在密封元件和第一和第二密封表面之间形成密封,以防止流体流过端口。

    Chip tray with tacky surface
    10.
    发明授权
    Chip tray with tacky surface 失效
    具有粘性表面的芯片托盘

    公开(公告)号:US07108899B2

    公开(公告)日:2006-09-19

    申请号:US10241805

    申请日:2002-09-11

    摘要: A tray for handling and retaining a plurality of components, wherein the tray has a rigid body portion and an elastomeric contact layer. The contact layer has a planar upper surface for contacting and retaining the components, and may be formed from a thermoplastic material having a surface energy between 20 dyne/cm and 100 dyne/cm, a hardness of between about Shore A15 and Shore D75, and a surface electrical resistivity of between about 1×104 ohms/square and 1×1012 ohms/square.

    摘要翻译: 一种用于处理和保持多个部件的托盘,其中所述托盘具有刚体部分和弹性体接触层。 接触层具有用于接触和保持部件的平坦的上表面,并且可以由具有20达因/厘米至100达因/厘米之间的表面能,约肖氏A15和肖氏D75之间的硬度的热塑性材料形成,以及 约1×10 4欧姆/平方英寸和1×10 12欧姆/平方的表面电阻率。