发明授权
- 专利标题： Antireflective coating composition comprising fused aromatic rings
- 专利标题（中）： 包含稠合芳环的抗反射涂料组合物
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申请号： US11872962申请日： 2007-10-16
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公开(公告)号： US08017296B2公开(公告)日： 2011-09-13
- 发明人: Francis Houlihan , David Abdallah , M. Dalil Rahman , Douglas McKenzie , Ruzhi Zhang , Allen G. Timko , WooKyu Kim , Ping-Hung Lu
- 申请人： Francis Houlihan , David Abdallah , M. Dalil Rahman , Douglas McKenzie , Ruzhi Zhang , Allen G. Timko , WooKyu Kim , Ping-Hung Lu
- 申请人地址： US NJ Somerville
- 专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人地址： US NJ Somerville
- 代理商 Sangya Jain
- 主分类号： G03F7/04
- IPC分类号： G03F7/04
摘要：
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.
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