发明授权
- 专利标题: Manufacturing method for semiconductor devices
- 专利标题(中): 半导体器件的制造方法
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申请号: US12898820申请日: 2010-10-06
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公开(公告)号: US08017440B2公开(公告)日: 2011-09-13
- 发明人: Yuichi Machida
- 申请人: Yuichi Machida
- 申请人地址: JP Kawasaki-shi
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2009-233125 20091007
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The reliability of a semiconductor device is enhanced. A first lead frame, a first semiconductor chip, a second lead frame, and a second semiconductor chip are stacked over an assembly jig in this order with solder in between and solder reflow processing is carried out to fabricate their assembly. Thereafter, this assembly is sandwiched between first and second molding dies to form an encapsulation resin portion. The upper surface of the second die is provided with steps. At a molding step, the second lead frame is clamped between the first and second dies at a position higher than the first lead frame; and a third lead frame is clamped between the first and second dies at a higher position. The assembly jig is provided with steps at the same positions as those of the steps in the upper surface of the second die in positions corresponding to those of the same.
公开/授权文献
- US20110081750A1 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICES 公开/授权日:2011-04-07
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