Invention Grant
- Patent Title: Silicone coating composition
- Patent Title (中): 硅胶涂料组合物
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Application No.: US11676673Application Date: 2007-02-20
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Publication No.: US08026040B2Publication Date: 2011-09-27
- Inventor: Hengpeng Wu , WooKyu Kim , Hong Zhuang , PingHung Lu , Mark Neisser , David Abdallah , Ruzhi Zhang
- Applicant: Hengpeng Wu , WooKyu Kim , Hong Zhuang , PingHung Lu , Mark Neisser , David Abdallah , Ruzhi Zhang
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp.
- Current Assignee: AZ Electronic Materials USA Corp.
- Current Assignee Address: US NJ Somerville
- Agent Alan P. Kass; Sangya Jain
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/075 ; G03F7/11
Abstract:
The present invention relates to a composition comprising: (a) a polymer having at least one repeating unit of formula where R1 is a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.
Public/Granted literature
- US20080196626A1 SILICONE COATING COMPOSITION Public/Granted day:2008-08-21
Information query
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