发明授权
- 专利标题: Substrate support bushing
- 专利标题(中): 基板支撑衬套
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申请号: US10779130申请日: 2004-02-12
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公开(公告)号: US08033245B2公开(公告)日: 2011-10-11
- 发明人: Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
- 申请人: Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, L.L.P.
- 主分类号: C23C16/50
- IPC分类号: C23C16/50 ; C23C16/503 ; C23C16/505 ; C23C16/458 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22 ; F16C29/02 ; F16C19/00 ; F16C19/50 ; F16C43/06 ; F16C33/38
摘要:
An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
公开/授权文献
- US20050180737A1 Substrate support bushing 公开/授权日:2005-08-18