发明授权
- 专利标题: Gradient thin film
- 专利标题(中): 渐变薄膜
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申请号: US12177865申请日: 2008-07-22
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公开(公告)号: US08043716B2公开(公告)日: 2011-10-25
- 发明人: Ho Sup Kim , Sang Soo Oh , Tae Hyung Kim , Dong Woo Ha , Kyu Jung Song , Hong Soo Ha , Rock Kil Ko , Nam Jin Lee
- 申请人: Ho Sup Kim , Sang Soo Oh , Tae Hyung Kim , Dong Woo Ha , Kyu Jung Song , Hong Soo Ha , Rock Kil Ko , Nam Jin Lee
- 申请人地址: KR
- 专利权人: Korea Electrotechnology Research Institute
- 当前专利权人: Korea Electrotechnology Research Institute
- 当前专利权人地址: KR
- 代理机构: Park & Associates IP Law, P.C.
- 优先权: KR10-2007-0108749 20071029
- 主分类号: H01L39/12
- IPC分类号: H01L39/12 ; H01L39/24 ; H01B12/02 ; B05D5/12
摘要:
Disclosed herein is a gradient thin film, formed on a substrate by simultaneously depositing different materials on the substrate using a plurality of thin film deposition apparatuses provided in a vacuum chamber, wherein the gradient thin film is formed such that the composition thereof is continuously changed depending on the thickness thereof by deposition control plates provided in the path through which the different materials move to the substrate. The gradient thin film is advantageous in that the thin film is formed by simultaneously depositing different materials using various deposition apparatuses, so that the composition thereof is continuously changed depending on the thickness thereof, with the result that the physical properties of a thin film are easily controlled and the number of deposition processes is decreased, and thus processing time and manufacturing costs are decreased, thereby improving economic efficiency.
公开/授权文献
- US20090110952A1 Gradient Thin Film 公开/授权日:2009-04-30