公开(公告)号：US08043716B2

公开(公告)日：2011-10-25

申请号：US12177865

申请日：2008-07-22

申请人： Ho Sup Kim ,  Sang Soo Oh ,  Tae Hyung Kim ,  Dong Woo Ha ,  Kyu Jung Song ,  Hong Soo Ha ,  Rock Kil Ko ,  Nam Jin Lee

发明人： Ho Sup Kim ,  Sang Soo Oh ,  Tae Hyung Kim ,  Dong Woo Ha ,  Kyu Jung Song ,  Hong Soo Ha ,  Rock Kil Ko ,  Nam Jin Lee

IPC分类号： H01L39/12 ,  H01L39/24 ,  H01B12/02 ,  B05D5/12

CPC分类号： C23C14/083 ,  C23C14/027 ,  C23C14/562 ,  H01L39/2461 ,  Y10S505/701 ,  Y10T428/12021 ,  Y10T428/12028 ,  Y10T428/12458 ,  Y10T428/12528

摘要： Disclosed herein is a gradient thin film, formed on a substrate by simultaneously depositing different materials on the substrate using a plurality of thin film deposition apparatuses provided in a vacuum chamber, wherein the gradient thin film is formed such that the composition thereof is continuously changed depending on the thickness thereof by deposition control plates provided in the path through which the different materials move to the substrate. The gradient thin film is advantageous in that the thin film is formed by simultaneously depositing different materials using various deposition apparatuses, so that the composition thereof is continuously changed depending on the thickness thereof, with the result that the physical properties of a thin film are easily controlled and the number of deposition processes is decreased, and thus processing time and manufacturing costs are decreased, thereby improving economic efficiency.

摘要翻译： 本文公开了一种梯度薄膜，其通过使用设置在真空室中的多个薄膜沉积装置同时在基板上沉积不同材料而形成在基板上，其中形成梯度薄膜使得其组成依赖于 在其厚度上，通过设置在不同材料通过其移动到基底的路径中的沉积控制板。 梯度薄膜的优点在于，通过使用各种沉积装置同时沉积不同的材料来形成薄膜，使得其组成根据其厚度而不断变化，结果是薄膜的物理性质容易 控制和沉积过程的数量减少，从而降低了处理时间和制造成本，从而提高了经济效率。