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公开(公告)号：US08043716B2
公开(公告)日：2011-10-25
申请号：US12177865
申请日：2008-07-22
申请人： Ho Sup Kim , Sang Soo Oh , Tae Hyung Kim , Dong Woo Ha , Kyu Jung Song , Hong Soo Ha , Rock Kil Ko , Nam Jin Lee
发明人： Ho Sup Kim , Sang Soo Oh , Tae Hyung Kim , Dong Woo Ha , Kyu Jung Song , Hong Soo Ha , Rock Kil Ko , Nam Jin Lee
CPC分类号： C23C14/083 , C23C14/027 , C23C14/562 , H01L39/2461 , Y10S505/701 , Y10T428/12021 , Y10T428/12028 , Y10T428/12458 , Y10T428/12528
摘要： Disclosed herein is a gradient thin film, formed on a substrate by simultaneously depositing different materials on the substrate using a plurality of thin film deposition apparatuses provided in a vacuum chamber, wherein the gradient thin film is formed such that the composition thereof is continuously changed depending on the thickness thereof by deposition control plates provided in the path through which the different materials move to the substrate. The gradient thin film is advantageous in that the thin film is formed by simultaneously depositing different materials using various deposition apparatuses, so that the composition thereof is continuously changed depending on the thickness thereof, with the result that the physical properties of a thin film are easily controlled and the number of deposition processes is decreased, and thus processing time and manufacturing costs are decreased, thereby improving economic efficiency.
摘要翻译： 本文公开了一种梯度薄膜，其通过使用设置在真空室中的多个薄膜沉积装置同时在基板上沉积不同材料而形成在基板上，其中形成梯度薄膜使得其组成依赖于 在其厚度上，通过设置在不同材料通过其移动到基底的路径中的沉积控制板。 梯度薄膜的优点在于，通过使用各种沉积装置同时沉积不同的材料来形成薄膜，使得其组成根据其厚度而不断变化，结果是薄膜的物理性质容易 控制和沉积过程的数量减少，从而降低了处理时间和制造成本，从而提高了经济效率。
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公开(公告)号：US08353257B2
公开(公告)日：2013-01-15
申请号：US12177853
申请日：2008-07-22
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
CPC分类号： C23C14/562 , H01L39/2422
摘要： Disclosed herein is a deposition apparatus with a guide roller for a long superconducting tape. The deposition apparatus has a supply reel which is provided in a vacuum chamber and rotated to supply the tape, a feed and deposition unit which is spaced apart from the supply reel and vacuum deposits a superconducting layer on the tape while feeding the tape, and a collection reel which is spaced apart from the feed and deposition unit and is rotated to collect the vacuum-deposited tape. The feed and deposition unit includes a drum which is rotated to wind the tape on a predetermined portion of an outer circumference of the drum several times, thus feeding the tape, and a guide roller which is spaced apart from the drum, includes a plurality of rollers each having on an outer circumference thereof grooves and protrusions at regular intervals, and is inclined at a predetermined angle with respect to a rotating shaft of the drum by a sum of a width of the tape and a thickness of each of the protrusions, with the tape passing over an outer circumference of the guide roller. The invention deposits a superconducting layer while maintaining constant tension when the tape is thermally deposited, thus preventing the tape from being deformed because of the difference in the thermal expansion and contraction of the tape resulting from non-uniform tension.
摘要翻译： 本文公开了一种具有用于长超导带的导辊的沉积设备。 沉积装置具有供给卷轴，该供给卷轴设置在真空室中并旋转以供应带子，与供给卷轴间隔开的进料和沉积单元，并且在馈送带的同时真空沉积带上的超导层，并且 收集卷轴与进料和沉积单元间隔开并旋转以收集真空沉积带。 进料和沉积单元包括滚筒，该滚筒旋转以将带卷绕在滚筒的外周的预定部分上几次，从而进给带，并且与滚筒间隔开的引导辊包括多个 每个辊子的外圆周上均有规则间隔的凹槽和凸起，并且相对于滚筒的旋转轴以预定的角度倾斜一个带的宽度和每个凸起的厚度之和， 磁带经过引导辊的外圆周。 当带被热沉积时，本发明沉积超导层同时保持恒定的张力，从而防止由于不均匀张力导致的带的热膨胀和收缩的差异而导致带变形。
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3.发明申请Method And Apparatus For Manufacturing Superconducting Tape Through Integrated Process 有权通过集成工艺制造超导磁带的方法和装置公开(公告)号：US20080220976A1
公开(公告)日：2008-09-11
申请号：US11863251
申请日：2007-09-28
申请人： Ho Sup Kim , Sang Soo Oh , Hong Soo Ha , Kyu Jung Song , Dong Woo Ha , Rock Kil Ko
发明人： Ho Sup Kim , Sang Soo Oh , Hong Soo Ha , Kyu Jung Song , Dong Woo Ha , Rock Kil Ko
IPC分类号： H01L39/24
CPC分类号： H01L39/2432 , C23C14/0036 , C23C14/08 , C23C14/562 , C23C14/5806 , Y10S505/704 , Y10S505/73
摘要： A method and apparatus for manufacturing superconducting tape through an integrated process, including the steps of: heat-treating a substrate wound on a drum in a reaction chamber; continuously depositing components, constituting a buffer layer, a superconducting layer, a contact resistance layer, and a protective layer of the superconducting tape, which are supplied from a deposition chamber, on the substrate; and heat-treating the substrate deposited with the components. The present invention is advantageous in that the unit cost and time for manufacturing a superconducting tape are decreased because all processes for manufacturing a superconducting tape can be performed under the same conditions, the uniformity and performance of a superconducting tape is improved because the same deposition conditions are applied to all of the process for manufacturing a superconducting tape, and a high-quality superconducting tape having high deposition efficiency can be obtained because specific components can be deposited on a large-sized substrate using a drum.
摘要翻译： 一种用于通过一体化方法制造超导带的方法和装置，包括以下步骤：对缠绕在反应室中的滚筒上的基底进行热处理; 在沉积室上连续沉积构成缓冲层，超导层，接触电阻层和超导带的保护层的组分，在沉积室上提供; 并对沉积有组分的基材进行热处理。 本发明的优点在于，制造超导带的单位成本和时间减少，因为用于制造超导带的所有工艺都可以在相同条件下进行，因为超导带的均匀性和性能得到改善，因为相同的沉积条件 适用于制造超导带的所有方法，并且可以获得具有高沉积效率的高品质超导带，因为可以使用滚筒将特定的部件沉积在大尺寸基板上。
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公开(公告)号：US20090107395A1
公开(公告)日：2009-04-30
申请号：US12177853
申请日：2008-07-22
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
IPC分类号： C23C14/24
CPC分类号： C23C14/562 , H01L39/2422
摘要： Disclosed herein is a deposition apparatus with a guide roller for a long superconducting tape. The deposition apparatus has a supply reel which is provided in a vacuum chamber and rotated to supply the tape, a feed and deposition unit which is spaced apart from the supply reel and vacuum deposits a superconducting layer on the tape while feeding the tape, and a collection reel which is spaced apart from the feed and deposition unit and is rotated to collect the vacuum-deposited tape. The feed and deposition unit includes a drum which is rotated to wind the tape on a predetermined portion of an outer circumference of the drum several times, thus feeding the tape, and a guide roller which is spaced apart from the drum, includes a plurality of rollers each having on an outer circumference thereof grooves and protrusions at regular intervals, and is inclined at a predetermined angle with respect to a rotating shaft of the drum by a sum of a width of the tape and a thickness of each of the protrusions, with the tape passing over an outer circumference of the guide roller. The invention deposits a superconducting layer while maintaining constant tension when the tape is thermally deposited, thus preventing the tape from being deformed because of the difference in the thermal expansion and contraction of the tape resulting from non-uniform tension.
摘要翻译： 本文公开了一种具有用于长超导带的导辊的沉积设备。 沉积装置具有供给卷轴，该供给卷轴设置在真空室中并旋转以供应带子，与供应卷轴间隔开的进料和沉积单元，并且在馈送带的同时真空沉积带上的超导层，并且 收集卷轴与进料和沉积单元间隔开并旋转以收集真空沉积带。 进料和沉积单元包括滚筒，该滚筒旋转以将带卷绕在滚筒的外周的预定部分上几次，从而进给带，并且与滚筒间隔开的引导辊包括多个 每个辊子的外圆周上均有规则间隔的凹槽和凸起，并且相对于滚筒的旋转轴以预定的角度倾斜一个带的宽度和每个凸起的厚度之和， 磁带经过引导辊的外圆周。 当带被热沉积时，本发明沉积超导层同时保持恒定的张力，从而防止由于不均匀张力导致的带的热膨胀和收缩的差异而导致带变形。
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公开(公告)号：US20080067273A1
公开(公告)日：2008-03-20
申请号：US11834607
申请日：2007-08-06
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
IPC分类号： G11B15/32
CPC分类号： G11B23/00 , B65H51/22 , B65H2601/2532 , B65H2701/37 , C23C14/088 , C23C14/562
摘要： Disclosed is a long-tape deposition apparatus for depositing specific substance on superconductive tape. The apparatus includes a drum having a helically-shaped guide groove formed on the outer surface thereof and a strip of tape wound along the guide groove and disposed in a vacuum chamber, a deposition source disposed to be distanced from the drum, a supply reel and a retreat reel disposed at respective sides of a shaft of the drum for supply and retreat of the tape, respectively, in which when the drum rotates, specific substance from the deposition source is deposited on the surface of the tape and at the same time the tape is continuously supplied and retreated by the supply reel and the retreat reel, and a slip-roller installed to extend along longitudinal direction of the drum, to be near the circumferential surface of the drum and to protrude from the outer surface of the drum, the slip-roller which rotates along moving direction of the tape enabling the tape to slip over the guide groove of the drum.
摘要翻译： 公开了一种用于在超导带上沉积特定物质的长带沉积设备。 该设备包括：滚筒，其外表面上形成有一个螺旋状的引导槽，一条带沿着引导槽缠绕并设置在真空室中;一个设置成与滚筒隔开的沉积源，一个供应卷轴和 设置在滚筒的轴的相应侧的后退卷轴，用于分别供带和后退，其中当滚筒旋转时，来自沉积源的特定物质沉积在带的表面上，并且同时 胶带由供带盘和后退卷轴连续供给和退回，并且安装成沿着滚筒的纵向方向延伸的滑动辊靠近滚筒的圆周表面并且从滚筒的外表面突出， 滑动辊沿带的移动方向旋转，使得带能够滑过滚筒的引导槽。
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6.发明申请公开(公告)号：US20090111700A1
公开(公告)日：2009-04-30
申请号：US12177749
申请日：2008-07-22
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
CPC分类号： H01L39/143 , H01L39/248
摘要： Disclosed herein is a superconducting strip having a metal coating layer and a method of manufacturing the superconducting strip. The method of manufacturing the superconducting strip includes: washing a superconducting thin film, a stabilizing substrate and an anti-bonding substrate with alcohol; forming a metal coating layer on each of the superconducting thin film and stabilizing substrate; adhering the superconducting thin film and stabilizing substrate to each other such that the metal coating layer formed on the superconducting thin film faces the metal coating layer formed on the stabilizing substrate; disposing the anti-bonding substrate on an outside of the stabilizing substrate and then winding the anti-bonding substrate such that the anti-bonding substrate and the stabilizing substrate are closely adhered to each other by winding the anti-bonding substrate around a bobbin under a predetermined tension; and heat-treating the superconducting thin film and stabilizing substrate such that they are bonded to each other by the metal coating layer disposed therebetween.
摘要翻译： 本文公开了具有金属涂层的超导条和制造超导条的方法。 超导条的制造方法包括：用醇洗涤超导薄膜，稳定基板和抗粘合基板; 在每个超导薄膜和稳定基板上形成金属涂层; 将超导薄膜和稳定基板彼此粘合，使得形成在超导薄膜上的金属涂层面对形成在稳定基板上的金属涂层; 将所述防粘接基板设置在所述稳定基板的外侧，然后卷绕所述防粘接基板，使得所述防粘接基板和所述稳定基板通过将所述防粘接基板卷绕在绕线管的下方而彼此紧密地粘合 预定张力; 对超导薄膜和稳定基板进行热处理，使它们通过设置在其间的金属涂层彼此接合。
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公开(公告)号：US08900365B2
公开(公告)日：2014-12-02
申请号：US11834607
申请日：2007-08-06
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
CPC分类号： G11B23/00 , B65H51/22 , B65H2601/2532 , B65H2701/37 , C23C14/088 , C23C14/562
摘要： Disclosed is a deposition apparatus for depositing a specific substance on an elongate substrate such as an elongate strip of tape or film. The apparatus includes a vacuum chamber, supply reel and the for reel for supplying elongate substrate in rolled form, a drum, disposed in the vacuum chamber, the drum having a helically-shaped guide groove formed along an outer surface of the drum for receiving the elongate substrate supplied from the supply reel to be wound in the guide groove and to subsequently feed the elongate substrate to a retreat reel to wind thereon upon rotation of the drum, and a deposition source material for depositing a material onto a surface of the elongate substrate which is wound on the drum. The apparatus further includes at least one slip-roller disposed adjacent to the drum in a longitudinal direction of the drum, wherein the slip-roller at least partially protrudes outwardly from an outer surface of the drum and being rotated in a moving direction of the elongate substrate such that a portion of the elongated substrate received in the helically-shaped guide groove of the drum is pulled out of contact from the guide groove to reduce a frictional contact there-between as the elongated substrate is fed upon rotation of the drum and the slip-roller.
摘要翻译： 公开了一种沉积装置，用于将细长的基材上的特定物质沉积在细长的基材上，如长条带或胶带。 该设备包括一个真空室，供应卷轴和用于供应卷状的细长基材的卷轴，设置在真空室中的滚筒，该滚筒具有沿滚筒的外表面形成的螺旋状导向槽， 细长基材从供应卷轴供应以被卷绕在引导槽中，并且随后将细长基材送入退绕卷轴以在滚筒旋转时在其上卷绕;以及沉积源材料，用于将材料沉积到细长基材的表面上 它被卷绕在鼓上。 该设备还包括沿滚筒的纵向方向邻近滚筒设置的至少一个滑动辊，其中滑动辊至少部分地从滚筒的外表面向外突出并且沿着拉长的滚筒的移动方向旋转 衬底，使得容纳在滚筒的螺旋形引导槽中的细长衬底的一部分从引导槽被拉出不接触以减小其间的摩擦接触，因为当滚筒旋转时进给细长衬底 滑辊。
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8.发明授权公开(公告)号：US08367585B2
公开(公告)日：2013-02-05
申请号：US12177749
申请日：2008-07-22
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Kyu Jung Song , Rock Kil Ko , Ho Sup Kim
CPC分类号： H01L39/143 , H01L39/248
摘要： Disclosed herein is a superconducting strip having a metal coating layer and a method of manufacturing the superconducting strip. The method of manufacturing the superconducting strip includes: washing a superconducting thin film, a stabilizing substrate and an anti-bonding substrate with alcohol; forming a metal coating layer on each of the superconducting thin film and stabilizing substrate; adhering the superconducting thin film and stabilizing substrate to each other such that the metal coating layer formed on the superconducting thin film faces the metal coating layer formed on the stabilizing substrate; disposing the anti-bonding substrate on an outside of the stabilizing substrate and then winding the anti-bonding substrate such that the anti-bonding substrate and the stabilizing substrate are closely adhered to each other by winding the anti-bonding substrate around a bobbin under a predetermined tension; and heat-treating the superconducting thin film and stabilizing substrate such that they are bonded to each other by the metal coating layer disposed therebetween.
摘要翻译： 本文公开了具有金属涂层的超导条和制造超导条的方法。 超导条的制造方法包括：用醇洗涤超导薄膜，稳定基板和抗粘合基板; 在每个超导薄膜和稳定基板上形成金属涂层; 将超导薄膜和稳定基板彼此粘合，使得形成在超导薄膜上的金属涂层面对形成在稳定基板上的金属涂层; 将所述防粘接基板设置在所述稳定基板的外侧，然后卷绕所述防粘接基板，使得所述防粘接基板和所述稳定基板通过将所述防粘接基板卷绕在绕线管的下方而彼此紧密地粘合 预定张力; 对超导薄膜和稳定基板进行热处理，使它们通过设置在其间的金属涂层彼此接合。
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9.发明授权公开(公告)号：US08026197B2
公开(公告)日：2011-09-27
申请号：US11863251
申请日：2007-09-28
申请人： Ho Seop Kim , Sang Soo Oh , Hong Soo Ha , Kyu Jung Song , Dong Woo Ha , Rock Kil Ko
发明人： Ho Seop Kim , Sang Soo Oh , Hong Soo Ha , Kyu Jung Song , Dong Woo Ha , Rock Kil Ko
CPC分类号： H01L39/2432 , C23C14/0036 , C23C14/08 , C23C14/562 , C23C14/5806 , Y10S505/704 , Y10S505/73
摘要： A method and apparatus for manufacturing superconducting tape through an integrated process, including the steps of: heat-treating a substrate wound on a drum in a reaction chamber; continuously depositing components, constituting a buffer layer, a superconducting layer, a contact resistance layer, and a protective layer of the superconducting tape, which are supplied from a deposition chamber, on the substrate; and heat-treating the substrate deposited with the components. The present invention is advantageous in that the unit cost and time for manufacturing a superconducting tape are decreased because all processes for manufacturing a superconducting tape can be performed under the same conditions, the uniformity and performance of a superconducting tape is improved because the same deposition conditions are applied to all of the process for manufacturing a superconducting tape, and a high-quality superconducting tape having high deposition efficiency can be obtained because specific components can be deposited on a large-sized substrate using a drum.
摘要翻译： 一种用于通过一体化方法制造超导带的方法和装置，包括以下步骤：对缠绕在反应室中的滚筒上的基底进行热处理; 在沉积室上连续沉积构成缓冲层，超导层，接触电阻层和超导带的保护层的组分，在沉积室上提供; 并对沉积有组分的基材进行热处理。 本发明的优点在于，制造超导带的单位成本和时间减少，因为用于制造超导带的所有工艺都可以在相同条件下进行，因为超导带的均匀性和性能得到改善，因为相同的沉积条件 适用于制造超导带的所有方法，并且可以获得具有高沉积效率的高品质超导带，因为可以使用滚筒将特定的部件沉积在大尺寸基板上。
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10.发明授权公开(公告)号：US08034746B2
公开(公告)日：2011-10-11
申请号：US12495350
申请日：2009-06-30
申请人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Rock Kil Ko , Ho Sup Kim
发明人： Hong Soo Ha , Sang Soo Oh , Dong Woo Ha , Rock Kil Ko , Ho Sup Kim
CPC分类号： H01L39/2403 , H01L39/14 , Y10T29/49014
摘要： Disclosed herein is a method of manufacturing round wire using superconducting tape, including the steps of: slitting superconducting tape into superconducting tape strips; silver-coating the slit superconducting tape strips; laminating the silver-coated superconducting tape strips to form a superconducting tape laminate having a square cross-section; holding the superconducting tape laminate; heat-treating the fixed superconducting tape laminate to cause diffusion junction between silver; and copper-plating the heat-treated superconducting tape laminate to have a circular section. The method is advantageous in that, since it is formed by slitting, silver-coating and laminating conventional superconducting tape, its superconducting layer can be protected, and it has a circular cross-section, so that it can be easily joined and wound, with the result that it is expected that, like general copper wires, its application fields will be enlarged because it can be wound in a solenoid shape at the time of magnetic winding.
摘要翻译： 本文公开了一种使用超导带制造圆线的方法，包括以下步骤：将超导带切割成超导带条; 银涂层狭缝超导带条; 层压银涂覆的超导带条以形成具有正方形横截面的超导带层压板; 保持超导带层压板; 对固定超导胶带层压板进行热处理，以使银之间发生扩散连接; 并且将经热处理的超导带层压板进行镀铜以具有圆形截面。 该方法的优点在于，由于其通过切割，银涂覆和层压常规的超导带形成，所以其超导层可以被保护，并且其具有圆形横截面，使得其可以容易地接合和缠绕， 其结果是，像一般的铜线一样，其应用领域将被扩大，因为在磁性绕组时可以卷绕成螺线管形状。
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