发明授权
US08062929B2 Semiconductor device and method of stacking same size semiconductor die electrically connected through conductive via formed around periphery of the die
有权
半导体器件和堆叠相同尺寸的半导体管芯的方法,其通过形成在管芯周围的导电通孔电连接
- 专利标题: Semiconductor device and method of stacking same size semiconductor die electrically connected through conductive via formed around periphery of the die
- 专利标题(中): 半导体器件和堆叠相同尺寸的半导体管芯的方法,其通过形成在管芯周围的导电通孔电连接
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申请号: US12788785申请日: 2010-05-27
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公开(公告)号: US08062929B2公开(公告)日: 2011-11-22
- 发明人: Byung Tai Do , Heap Hoe Kuan , Seng Guan Chow
- 申请人: Byung Tai Do , Heap Hoe Kuan , Seng Guan Chow
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group
- 代理商 Robert D. Atkins
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/02 ; H01L23/06 ; H01L23/12 ; H01L23/053 ; H01L23/34 ; H01L23/04 ; H01L23/13 ; H01L23/31
摘要:
A semiconductor device has a plurality of similar sized semiconductor die each with a plurality of bond pads formed over a surface of the semiconductor die. An insulating layer is formed around a periphery of each semiconductor die. A plurality of conductive THVs is formed through the insulating layer. A plurality of conductive traces is formed over the surface of the semiconductor die electrically connected between the bond pads and conductive THVs. The semiconductor die are stacked to electrically connect the conductive THVs between adjacent semiconductor die. The stacked semiconductor die are mounted within an integrated cavity of a substrate or leadframe structure. An encapsulant is deposited over the substrate or leadframe structure and the semiconductor die. A thermally conductive lid is formed over a surface of the substrate or leadframe structure. The stacked semiconductor die are attached to the thermally conductive lid.
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